METHOD FOR INTEGRATING DRAM AND NVM
    1.
    发明申请
    METHOD FOR INTEGRATING DRAM AND NVM 审中-公开
    集成DRAM和NVM的方法

    公开(公告)号:US20120040504A1

    公开(公告)日:2012-02-16

    申请号:US12853450

    申请日:2010-08-10

    CPC classification number: H01L27/105 H01L27/10894 H01L27/10897 H01L27/11526

    Abstract: The present invention discloses a method for integrating DRAM and NVM, which comprises steps: sequentially forming on a portion of surface of a DRAM semiconductor substrate a first gate insulation layer and a first gate layer functioning as a floating gate; and implanting ion into regions of the semiconductor substrate, which are at two sides of the first gate insulation layer, to form two heavily-doped areas that are adjacent to the first gate insulation layer and respectively function as a drain and a source; respectively forming over the first gate layer a second gate insulation layer and a second gate layer functioning as a control gate. The present invention not only increases the transmission speed but also reduces the power consumption, the fabrication cost and the package cost.

    Abstract translation: 本发明公开了一种用于整合DRAM和NVM的方法,包括以下步骤:在DRAM半导体衬底的表面的一部分上依次形成第一栅极绝缘层和用作浮动栅极的第一栅极层; 以及将离子注入位于所述第一栅极绝缘层两侧的半导体衬底的区域中,以形成与所述第一栅极绝缘层相邻并分别用作漏极和源极的两个重掺杂区域; 分别在第一栅极层上形成第二栅极绝缘层和用作控制栅极的第二栅极层。 本发明不仅提高了传输速度,而且降低了功耗,制造成本和封装成本。

    NON-SELF-ALIGNED NON-VOLATILE MEMORY STRUCTURE
    2.
    发明申请
    NON-SELF-ALIGNED NON-VOLATILE MEMORY STRUCTURE 审中-公开
    非自对准的非易失性存储器结构

    公开(公告)号:US20130334586A1

    公开(公告)日:2013-12-19

    申请号:US13524058

    申请日:2012-06-15

    CPC classification number: H01L29/7881 H01L27/11521 H01L29/40114

    Abstract: A non-self-aligned non-volatile memory structure, comprising: a semiconductor substrate; a left floating gate memory cell and a right floating gate memory cell; a control gate; and a gate insulation layer disposed among said two floating gate memory cells and said control gate. Drains of said two floating gate memory cells are connected to different voltage levels. Said control gate is over said two floating gate memory cells, to cover said floating gates of said two floating gate memory cells, so as to control said two floating gates simultaneously. Said non-self-aligned non-volatile memory structure mentioned above does not require line-to-line alignment of gates, thus reducing significantly the complexity of manufacturing process, and number of layers of photo masks required, in achieving production cost reduction.

    Abstract translation: 一种非自对准非易失性存储器结构,包括:半导体衬底; 左浮栅存储单元和右浮栅存储单元; 控制门 以及设置在所述两个浮动栅极存储单元和所述控制栅极之间的栅极绝缘层。 所述两个浮动栅极存储单元的漏极连接到不同的电压电平。 所述控制栅极位于所述两个浮动栅极存储单元之上,以覆盖所述两个浮动栅极存储单元的所述浮动栅极,以便同时控制所述两个浮动栅极。 上述所述非自对准非易失性存储器结构不需要栅极的线对齐对准,因此在实现生产成本降低的同时显着降低制造工艺的复杂性和所需的掩模层数。

    Cost saving electrically-erasable-programmable read-only memory (EEPROM) array
    3.
    发明授权
    Cost saving electrically-erasable-programmable read-only memory (EEPROM) array 有权
    节省成本的可擦写可编程只读存储器(EEPROM)阵列

    公开(公告)号:US08300469B2

    公开(公告)日:2012-10-30

    申请号:US12854407

    申请日:2010-08-11

    CPC classification number: G11C16/14 G11C16/0441

    Abstract: A cost saving EEPROM array, having: a plurality of parallel bit lines, a plurality of parallel word lines, and a plurality of parallel common source lines. The bit lines contain a first group bit lines; the word line includes a first and a second word lines; and the common source line includes a first common source line. And, a plurality of sub-memory arrays are provided. Each sub-memory array includes a first and a second memory cells disposed opposite to each other and located on two different sides of the first common source line; the first memory cell is connected to the first group bit lines, the first common source line, and the first word line, and the second memory cell is connected to the first group bit line, the first common source line, and the second word line.

    Abstract translation: 一种节省成本的EEPROM阵列,具有:多个并行位线,多个并行字线和多个并行公共源极线。 位线包含第一组位线; 字线包括第一和第二字线; 并且公共源极线包括第一公共源极线。 并且,提供多个子存储器阵列。 每个子存储器阵列包括彼此相对设置并位于第一公共源极线的两个不同侧上的第​​一和第二存储单元; 第一存储单元连接到第一组位线,第一公共源极线和第一字线,并且第二存储单元连接到第一组位线,第一公共源极线和第二字线 。

    Area saving electrically-erasable-programmable read-only memory (EEPROM) array
    4.
    发明授权
    Area saving electrically-erasable-programmable read-only memory (EEPROM) array 有权
    区域保存电可擦可编程只读存储器(EEPROM)阵列

    公开(公告)号:US08300461B2

    公开(公告)日:2012-10-30

    申请号:US12862082

    申请日:2010-08-24

    CPC classification number: G11C16/0416

    Abstract: An area saving electrically-erasable-programmable read-only memory (EEPROM) array, having: a plurality of parallel bit lines, a plurality of parallel word lines, and a plurality of parallel common source lines. The bit lines are classified into a plurality of bit line groups, containing a first group bit line and a second group bit line; the word line includes a first word line; and the common source lines include a first common source line. In addition, a plurality of sub-memory arrays are provided. Each sub-memory array contains a first, second, third, and fourth memory cells. Wherein, the first and second memory cells are symmetrically arranged, and the third and fourth memory cells are symmetrically arranged; also, the first and second memory cells, and the third and fourth memory cells are symmetrically arranged with the first common source line as a symmetric axis.

    Abstract translation: 一种保存电可擦除可编程只读存储器(EEPROM)阵列的区域,其具有:多个并行位线,多个并行字线和多个并行公共源极线。 位线分为多个位线组,包含第一组位线和第二组位线; 字线包括第一字线; 并且公共源极线包括第一公共源极线。 另外,提供了多个子存储器阵列。 每个子存储器阵列包含第一,第二,第三和第四存储器单元。 其中,第一和第二存储单元是对称排列的,第三和第四存储单元是对称排列的; 第一和第二存储单元以及第三和第四存储单元也以第一公共源极线为对称轴对称地布置。

    LOW-VOLTAGE EEPROM ARRAY
    5.
    发明申请
    LOW-VOLTAGE EEPROM ARRAY 有权
    低电压EEPROM阵列

    公开(公告)号:US20120039131A1

    公开(公告)日:2012-02-16

    申请号:US12854989

    申请日:2010-08-12

    CPC classification number: G11C16/0416 G11C16/0483 G11C16/14 H01L29/7881

    Abstract: A low-voltage EEPROM array, which has a plurality of parallel bit lines, parallel word lines and parallel common source lines is disclosed. The bit lines include a first bit line. The word lines include a first word line and a second word line. The common source lines include a first common source line and a second common source line. The low-voltage EEPROM array also has a plurality of sub-memory arrays. Each sub-memory array includes a first memory cell and a second memory cell. The first memory cell connects with the first bit line, the first common source line and the first word line. The second memory cell connects with the first bit line, the second common source line and the second word line. The first and second memory cells are symmetrical and arranged between the first and second common source lines.

    Abstract translation: 公开了一种低电压EEPROM阵列,其具有多个并行位线,并行字线和并行公共源极线。 位线包括第一位线。 字线包括第一字线和第二字线。 公共源极线包括第一公共源极线和第二公共源极线。 低电压EEPROM阵列还具有多个子存储器阵列。 每个子存储器阵列包括第一存储单元和第二存储单元。 第一存储单元与第一位线,第一公共源极线和第一字线连接。 第二存储单元与第一位线,第二公共源极线和第二字线连接。 第一和第二存储单元是对称的并且布置在第一和第二公共源极线之间。

    COST SAVING ELECTRICALLY-ERASABLE-PROGRAMMABLE READ-ONLY MEMORY (EEPROM) ARRAY
    6.
    发明申请
    COST SAVING ELECTRICALLY-ERASABLE-PROGRAMMABLE READ-ONLY MEMORY (EEPROM) ARRAY 有权
    成本节省电可擦除可编程只读存储器(EEPROM)阵列

    公开(公告)号:US20120039129A1

    公开(公告)日:2012-02-16

    申请号:US12854407

    申请日:2010-08-11

    CPC classification number: G11C16/14 G11C16/0441

    Abstract: A cost saving electrically-erasable-programmable read-only memory (EEPROM) array, having: a plurality of parallel bit lines, a plurality of parallel word lines, and a plurality of parallel common source lines. The bit lines are classified into a plurality of bit line groups, containing a first group bit lines; the word line includes a first and a second word lines; and the common source line includes a first common source line. And, a plurality of sub-memory arrays are provided. Each sub-memory array includes a first and a second memory cells disposed opposite to each other and located on two different sides of the first common source line; the first memory cell is connected to the first group bit lines, the first common source line, and the first word line, and the second memory cell is connected to the first group bit line, the first common source line, and the second word line.

    Abstract translation: 一种节省成本的电可擦除可编程只读存储器(EEPROM)阵列,其具有:多个并行位线,多个并行字线和多个并行公共源极线。 位线分为多个位线组,包含第一组位线; 字线包括第一和第二字线; 并且公共源极线包括第一公共源极线。 并且,提供多个子存储器阵列。 每个子存储器阵列包括彼此相对设置并位于第一公共源极线的两个不同侧上的第​​一和第二存储单元; 第一存储单元连接到第一组位线,第一公共源极线和第一字线,并且第二存储单元连接到第一组位线,第一公共源极线和第二字线 。

    NON-SELF ALIGNED NON-VOLATILE MEMORY STRUCTURE
    7.
    发明申请
    NON-SELF ALIGNED NON-VOLATILE MEMORY STRUCTURE 审中-公开
    非自对准非易失性存储器结构

    公开(公告)号:US20130181276A1

    公开(公告)日:2013-07-18

    申请号:US13351319

    申请日:2012-01-17

    CPC classification number: H01L29/7881 H01L29/40114 H01L29/42324

    Abstract: A non-self aligned non-volatile memory structure includes a semiconductor substrate; a first gate insulation layer on said semiconductor substrate; a floating gate on first gate insulation layer; two doped regions in said semiconductor substrate, which are respectively on two sides of said first gate insulation layer, and adjoining said first gate insulation layer; a second gate insulation layer on said floating gate; and a control gate on said second gate insulation layer. Width of said control gate on said floating gate is less than that of said floating gate, and width of said control gate not on said floating gate is equal to or greater than width of said floating gate. Through the two non-self aligned gates, the non-volatile memory does not need to meet the requirement of gate line-to-line alignment, thus reducing complexity and cost of manufacturing process.

    Abstract translation: 非自对准的非易失性存储器结构包括半导体衬底; 在所述半导体衬底上的第一栅极绝缘层; 第一栅绝缘层上的浮栅; 所述半导体衬底中分别位于所述第一栅极绝缘层的两侧上并邻接所述第一栅极绝缘层的两个掺杂区域; 所述浮栅上的第二栅极绝缘层; 以及在所述第二栅极绝缘层上的控制栅极。 所述浮置栅极上的所述控制栅极的宽度小于所述浮动栅极的宽度,而不在所述浮动栅极上的所述控制栅极的宽度等于或大于所述浮动栅极的宽度。 通过两个非自对准门,非易失性存储器不需要满足栅线对线对准的要求,从而降低制造工艺的复杂性和成本。

    Low-voltage EEPROM array
    8.
    发明授权
    Low-voltage EEPROM array 有权
    低电压EEPROM阵列

    公开(公告)号:US08305808B2

    公开(公告)日:2012-11-06

    申请号:US12854989

    申请日:2010-08-12

    CPC classification number: G11C16/0416 G11C16/0483 G11C16/14 H01L29/7881

    Abstract: A low-voltage EEPROM array, which has a plurality of parallel bit lines, parallel word lines and parallel common source lines is disclosed. The bit lines include a first bit line. The word lines include a first word line and a second word line. The common source lines include a first common source line and a second common source line. The low-voltage EEPROM array also has a plurality of sub-memory arrays. Each sub-memory array includes a first memory cell and a second memory cell. The first memory cell connects with the first bit line, the first common source line and the first word line. The second memory cell connects with the first bit line, the second common source line and the second word line. The first and second memory cells are symmetrical and arranged between the first and second common source lines.

    Abstract translation: 公开了一种低电压EEPROM阵列,其具有多个并行位线,并行字线和并行公共源极线。 位线包括第一位线。 字线包括第一字线和第二字线。 公共源极线包括第一公共源极线和第二公共源极线。 低电压EEPROM阵列还具有多个子存储器阵列。 每个子存储器阵列包括第一存储单元和第二存储单元。 第一存储单元与第一位线,第一公共源极线和第一字线连接。 第二存储单元与第一位线,第二公共源极线和第二字线连接。 第一和第二存储单元是对称的并且布置在第一和第二公共源极线之间。

    AREA SAVING ELECTRICALLY-ERASABLE-PROGRAMMABLE READ-ONLY MEMORY (EEPROM) ARRAY
    9.
    发明申请
    AREA SAVING ELECTRICALLY-ERASABLE-PROGRAMMABLE READ-ONLY MEMORY (EEPROM) ARRAY 有权
    区域可编程可编程可编程只读存储器(EEPROM)阵列

    公开(公告)号:US20120051147A1

    公开(公告)日:2012-03-01

    申请号:US12862082

    申请日:2010-08-24

    CPC classification number: G11C16/0416

    Abstract: An area saving electrically-erasable-programmable read-only memory (EEPROM) array, having: a plurality of parallel bit lines, a plurality of parallel word lines, and a plurality of parallel common source lines. The bit lines are classified into a plurality of bit line groups, containing a first group bit lines and a second group bit lines; the word line includes a first word line; and the common source lines include a first common source line. In addition, a plurality of sub-memory arrays are provided. Each sub-memory array contains a first, second, third, and fourth memory cells. Wherein, the first and second memory cells are symmetrically arranged, and the third and fourth memory cells are symmetrically arranged; also, the first and second memory cells, and the third and fourth memory cells are symmetrically arranged with the first common source line as a symmetric axis.

    Abstract translation: 一种保存电可擦除可编程只读存储器(EEPROM)阵列的区域,其具有:多个并行位线,多个并行字线和多个并行公共源极线。 位线被分成多个位线组,其包含第一组位线和第二组位线; 字线包括第一字线; 并且公共源极线包括第一公共源极线。 另外,提供了多个子存储器阵列。 每个子存储器阵列包含第一,第二,第三和第四存储器单元。 其中,第一和第二存储单元是对称排列的,第三和第四存储单元是对称排列的; 第一和第二存储单元以及第三和第四存储单元也以第一公共源极线为对称轴对称地布置。

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