MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20240349499A1

    公开(公告)日:2024-10-17

    申请号:US18342713

    申请日:2023-06-27

    摘要: A memory device and a manufacturing method thereof are provided. The memory device includes: active regions, defined in a semiconductor substrate; word line structures, formed on the semiconductor substrate, and intersected with the active regions, wherein each of the word line structures includes a floating gate and a control gate stacked on the floating gate; first protection layers, respectively covering an upper part of the control gate in one of the word line structures, wherein a bottom end of the control gate in each word line structure is lower than a bottom end of each first protection layer; and a second protection layer, covering the first protection layers, and wrapping the word line structures.

    VERTICAL MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240276723A1

    公开(公告)日:2024-08-15

    申请号:US18463500

    申请日:2023-09-08

    摘要: A vertical memory device includes a memory channel structure disposed on a substrate, a plurality of division layers disposed on the substrate and a gate electrode structure. The memory channel structure extends in a vertical direction substantially perpendicular to an upper surface of the substrate. The division layers contact the memory channel structure, respectively. The gate electrode structure contacts a sidewall of the memory channel structure, which may include a filling pattern, a channel disposed on a sidewall of the filling pattern and a charge storage structure disposed on an outer sidewall of the channel and sidewalls of the division layers, each of which extends through a portion of the charge storage structure and a portion of the channel. Each of the charge storage structure and the channel is divided into two parts by the division layers.