公开(公告)号：US20080106278A1

公开(公告)日：2008-05-08

申请号：US11556724

申请日：2006-11-06

申请人： Hsing Ya Huo ,  Chung-Lin Hsieh ,  Tsung-Yu Lee ,  Yang Yen-Ni

发明人： Hsing Ya Huo ,  Chung-Lin Hsieh ,  Tsung-Yu Lee ,  Yang Yen-Ni

IPC分类号： G01R31/26 ,  G06F19/00

CPC分类号： G01R31/2894

摘要： A centrally-controlled correlation system for testing a correlation wafer and comparing the testing results with the wafer's reference data that has been determined previously. The testing instructions and the correlation criteria are stored and transmitted from a central database. Such centrally-controlled correlation system improves the reliability of the correlation results and reduces the time to correlate a correlation wafer.

公开(公告)号：US07403864B2

公开(公告)日：2008-07-22

申请号：US11556724

申请日：2006-11-06

申请人： Hsing Ya Huo ,  Chung-Lin Hsieh ,  Tsung-Yu Lee ,  Yang Yen-Ni

发明人： Hsing Ya Huo ,  Chung-Lin Hsieh ,  Tsung-Yu Lee ,  Yang Yen-Ni

IPC分类号： G01R31/01 ,  G01N37/00

CPC分类号： G01R31/2894

摘要： A centrally-controlled correlation system for testing a correlation wafer and comparing the testing results with the wafer's reference data that has been determined previously. The testing instructions and the correlation criteria are stored and transmitted from a central database. Such centrally-controlled correlation system improves the reliability of the correlation results and reduces the time to correlate a correlation wafer.

摘要翻译： 一种用于测试相关晶片并将测试结果与先前已确定的晶片参考数据进行比较的中央控制相关系统。 测试指令和相关标准从中央数据库存储和发送。 这种中央控制的相关系统提高了相关结果的可靠性，并减少了相关晶片的相关时间。