公开(公告)号：US20130200271A1

公开(公告)日：2013-08-08

申请号：US13812842

申请日：2011-06-08

申请人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

发明人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

IPC分类号： H01J37/18

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J2237/2001 ,  H01J2237/2802

摘要： The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.

摘要翻译： 本发明的目的是提供一种带电粒子束装置，使得尖端部分可以有效地保持在清洁状态，同时阀体更换的频率也降低。 为了实现该目的，提供一种带电粒子束装置，包括：分隔件，位于带电粒子源侧真空空间和样品台侧真空空间之间，所述隔板还包括用于带电粒子束的开口 通过; 驱动器机构，其将快门部件移动到带电粒子束的光轴内的第一位置与带电粒子束的光轴外的第二位置; 以及控制驱动器机构的控制装置。 第一位置是其中挡板构件与分隔件隔开的位置，并且当挡板构件处于位于第一位置的状态时，控制装置执行在样本室和更换室之间打开阀的控制 位置。

公开(公告)号：US08933422B2

公开(公告)日：2015-01-13

申请号：US13812842

申请日：2011-06-08

申请人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

发明人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

IPC分类号： H01J37/18 ,  H01J37/16

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J2237/2001 ,  H01J2237/2802

摘要： The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.

摘要翻译： 本发明的目的是提供一种带电粒子束装置，使得尖端部分可以有效地保持在清洁状态，同时阀体更换的频率也降低。 为了实现该目的，提供一种带电粒子束装置，包括：分隔件，位于带电粒子源侧真空空间和样品台侧真空空间之间，所述隔板还包括用于带电粒子束的开口 通过; 驱动器机构，其将快门部件移动到带电粒子束的光轴内的第一位置与带电粒子束的光轴外的第二位置; 以及控制驱动器机构的控制装置。 第一位置是其中挡板构件与分隔件隔开的位置，并且当挡板构件处于位于第一位置的状态时，控制装置执行在样本室和更换室之间打开阀的控制 位置。