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    Surface profile measurement apparatus
    1.
    发明授权
    Surface profile measurement apparatus 有权

    公开(公告)号：US06646748B2

    公开(公告)日：2003-11-11

    申请号：US09921582

    申请日：2001-08-06

    申请人： Taizo Nakamura ,  Yoshio Saruki ,  Tatsuya Narumi ,  Yasushi Fukumoto

    发明人： Taizo Nakamura ,  Yoshio Saruki ,  Tatsuya Narumi ,  Yasushi Fukumoto

    IPC分类号： G01B902

    CPC分类号： G01B11/255

    摘要： To provide a surface profile measurement apparatus capable of efficient measurement of the surface profile of an object. A diamond indenter (16) is movably mounted. The tip end of the diamond indenter (16) is irradiated by light, and the light reflected by the tip end (17) is condensed through a lens (46). The condensed light is observed by a photo sensor (42) for measurement of the curvature radius of the tip end (17). Meanwhile, the light reflected by the tip end (17) and the light reflected by a reference body (66) together cause an interference fringe. The interference fringe is observed by a CCD camera (44) to measure the surface profile of tip end (17).

    Imaging probe
    2.
    发明授权
    Imaging probe 有权
    成像探头

    公开(公告)号：US06621065B1

    公开(公告)日：2003-09-16

    申请号：US09708535

    申请日：2000-11-09

    申请人： Yasushi Fukumoto ,  Seiji Shimokawa ,  Kenji Okabe

    发明人： Yasushi Fukumoto ,  Seiji Shimokawa ,  Kenji Okabe

    IPC分类号： H01J4014

    CPC分类号： H04N5/2256

    摘要： A CCD camera (27) images a work to generate its image data. An imaging optical system (24, 25, 26) focuses an image of the work on the CCD camera (27). A down-projection illumination source (31) includes at least one semiconductor light-emitting device for producing a down-projection illumination light to illuminate the work from above. An illuminating optical system (29) joins the illumination light from the down-projection illumination source (31) to the imaging optical system in order to lead the illumination light to the work via the imaging optical system. These optical components are mounted on a chassis (23) to construct an imaging probe (1), which is employed at any angle as a measuring probe of a three-dimensional tester.

    摘要翻译： CCD相机（27）对作品进行成像以生成其图像数据。 成像光学系统（24,25,26）将作品的图像聚焦在CCD照相机（27）上。 下投影照明源（31）包括至少一个半导体发光装置，用于产生从上方照射工件的下投照明光。 照明光学系统（29）将来自下投照明源（31）的照明光连接到成像光学系统，以便经由成像光学系统将照明光引导到工件。 这些光学部件被安装在底架23上，构成成像探头（1），其以任意角度被用作三维测试仪的测量探针。

    Offset amount calibrating method and surface profile measuring machine
    3.
    发明授权
    Offset amount calibrating method and surface profile measuring machine 有权
    偏移量校准方法和表面轮廓测量机

    公开(公告)号：US08654351B2

    公开(公告)日：2014-02-18

    申请号：US12900788

    申请日：2010-10-08

    申请人： Yasushi Fukumoto ,  Koichi Komatsu ,  Fumihiro Takemura ,  Sadaharu Arita ,  Kotaro Hirano

    发明人： Yasushi Fukumoto ,  Koichi Komatsu ,  Fumihiro Takemura ,  Sadaharu Arita ,  Kotaro Hirano

    IPC分类号： G01B11/30

    CPC分类号： G01B5/008 ,  G01B11/005 ,  G01B21/042

    摘要： An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

    摘要翻译： 提供了获得表面轮廓测量机的接触型检测器和图像探针之间的偏移量的偏移量校准方法。 该方法包括：在舞台上设置具有具有水平差的格子图案的表面的校准夹具; 通过接触型检测器测量校准夹具的格子图案，以获得格子图案的第一参考位置; 通过图像探测器捕获校准夹具的格子图案的图像，以获得格子图案的第二参考位置; 以及从所述第一和第二参考位置之间的差获得所述偏移量。

    OFFSET AMOUNT CALIBRATING METHOD AND SURFACE PROFILE MEASURING MACHINE
    4.
    发明申请
    OFFSET AMOUNT CALIBRATING METHOD AND SURFACE PROFILE MEASURING MACHINE 有权
    偏移量校准方法和表面型材测量机

    公开(公告)号：US20110085177A1

    公开(公告)日：2011-04-14

    申请号：US12900788

    申请日：2010-10-08

    申请人： Yasushi FUKUMOTO ,  Koichi KOMATSU ,  Fumihiro TAKEMURA ,  Sadaharu ARITA ,  Kotaro HIRANO

    发明人： Yasushi FUKUMOTO ,  Koichi KOMATSU ,  Fumihiro TAKEMURA ,  Sadaharu ARITA ,  Kotaro HIRANO

    IPC分类号： G01B11/24

    CPC分类号： G01B5/008 ,  G01B11/005 ,  G01B21/042

    摘要： An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

    摘要翻译： 提供了一种获得用于表面轮廓测量机的接触型检测器和图像探针之间的偏移量的偏移量校准方法。 该方法包括：在舞台上设置具有具有水平差的格子图案的表面的校准夹具; 通过接触型检测器测量校准夹具的格子图案，以获得格子图案的第一参考位置; 通过图像探测器捕获校准夹具的格子图案的图像，以获得格子图案的第二参考位置; 以及从所述第一和第二参考位置之间的差获得所述偏移量。

    Focus detection unit and microscope using the focus detection unit
    6.
    发明授权
    Focus detection unit and microscope using the focus detection unit 失效
    焦点检测单元和显微镜使用焦点检测单元

    公开(公告)号：US5963366A

    公开(公告)日：1999-10-05

    申请号：US965527

    申请日：1997-11-06

    申请人： Taizo Nakamura ,  Yasushi Fukumoto ,  Yuwu Zhang

    发明人： Taizo Nakamura ,  Yasushi Fukumoto ,  Yuwu Zhang

    IPC分类号： G03B13/36 ,  G02B7/28 ,  G02B21/24 ,  G02B21/26 ,  G02B21/06 ,  G02B23/06

    CPC分类号： G02B21/244

    摘要： A focus detection unit including an optical system employing an image sandwiching method is disclosed. In the focus detection unit, a double slit mask (12) forming double sight lines is disposed on the optical axis of a lamp 10 while a single slit mask (16) forming an single sight line is disposed on the optical axis of a lamp (14). A triangular pole prism 18 is provided, consisting of first and second side surfaces, which together constitutes an edge, and a plane opposing the edge. The prism (18) is disposed such that the double and single sight line are able to irradiate the first and second side surfaces. The prism reflects the incoming lines toward a plane before the right-angle edge. Before the edge of the prism (18), a projection lens (20) is provided for forming images of the double and single sight lines which have been reflected by the prism (18) and separated by a mask (22), at a both aiming line imaging position 100. The images are projected onto a workpiece.

    摘要翻译： 公开了一种包括使用图像夹持方法的光学系统的焦点检测单元。 在焦点检测单元中，在灯10的光轴上设置形成双重视线的双缝掩模（12），同时在灯的光轴上设置形成单个视线的单个狭缝掩模（16） 14）。 提供三角柱棱镜18，其由第一和第二侧表面组成，它们一起构成边缘，以及与边缘相对的平面。 棱镜（18）被布置成使得双重和单个瞄准线能够照射第一和第二侧表面。 棱镜将入射线反射到直角边缘之前的平面。 在棱镜（18）的边缘之前，设置投影透镜（20），用于形成由棱镜（18）反射并由掩模（22）分离的双和单视线的图像，两者 瞄准线成像位置100.图像被投影到工件上。