Semiconductor test module and method of testing semiconductor device
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    发明申请
    Semiconductor test module and method of testing semiconductor device 审中-公开
    半导体测试模块和半导体器件测试方法

    公开(公告)号:US20050110513A1

    公开(公告)日:2005-05-26

    申请号:US10969988

    申请日:2004-10-22

    CPC分类号: G01R31/2889

    摘要: A semiconductor test module comprises an interface that inputs test condition information showing a test condition of a subject to be tested from an external testing device which tests electric characteristics of the subject, and that outputs test result information showing a result of testing the subject to the external testing device; a first storage section that stores the test condition information; a processor that processes the test condition information independently of the external testing device; an output section that outputs a test signal based on the test condition information to the subject in parallel with the external testing device, following an instruction from the processor; an input section that inputs a response signal from the subject in response to the test signal; and a second storage section that stores information based on the response signal as the test result information.

    摘要翻译: 半导体测试模块包括从测试对象的电气特性的外部测试装置输入显示被测试对象的测试条件的测试条件信息的接口,并将显示被测试结果的测试结果信息输出到 外部检测装置; 存储测试条件信息的第一存储部分; 处理器,独立于外部测试装置处理测试条件信息; 输出部,其根据来自所述处理器的指示,将与所述测试条件信息对应的测试信号与所述外部测试装置并行输出; 输入部,其响应于所述测试信号输入来自所述对象的响应信号; 以及第二存储部,其基于所述响应信号来存储作为所述测试结果信息的信息。