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    Image sensor having ITO electrodes with an ONO layer
    1.
    发明授权
    Image sensor having ITO electrodes with an ONO layer 失效
    具有ITO电极和ONO层的图像传感器

    公开(公告)号：US5804845A

    公开(公告)日：1998-09-08

    申请号：US727107

    申请日：1996-10-08

    申请人： Constantine N. Anagnostopoulos ,  Stephen Lawrence Kosman ,  Yawcheng Lo

    发明人： Constantine N. Anagnostopoulos ,  Stephen Lawrence Kosman ,  Yawcheng Lo

    IPC分类号： H01L27/146 ,  H01L31/0224 ,  H01L27/148 ,  H01L29/768

    CPC分类号： H01L31/022466 ,  H01L27/14601

    摘要： By incorporating an ITO electrode which is more transparent than polysilicon, and designing the pixel such that it has asymmetric gates with as much as possible of its light sensitive region covered by an ITO electrode, light sensitivity is increased. To solve the problem of impurity diffusion from the ITO electrode into the silicon below, the conventional Silicon Dioxide gate dielectric was replaced with an Oxide/Nitride/Oxide stack. Employing at least some polysilicon electrodes with ITO electrodes is desirable to allow entrance passages through which hydrogen passivation can be accomplished. The pixel architecture can be designed to increase sensitivity further by other design choices. The first of these choices is to incorporate a lenslet on each pixel such that as much as possible of the light falling on the pixel is made to pass through the portion of the pixel covered with ITO. The pixel light sensitivity improves not only because the light passes through the more transparent ITO electrode, but also because some of the light that would have fallen on the LOD region and would be lost, is now collected. The second method is for color CCD sensors with color filter patterns, such as the "BAYER" color filter pattern to name just one, to have the overlap of the color filters, which does not allow light transmission, to occur over the less sensitive area of the pixel, which is the area covered with the polysilicon electrode. For proper operation a slight modification of the vertical clock timing is needed.

    摘要翻译： 通过结合比多晶硅更透明的ITO电极，并且设计像素使其具有尽可能多的由ITO电极覆盖的光敏区域的非对称栅极，增加了光灵敏度。 为了解决从ITO电极到下面的硅的杂质扩散的问题，常规的二氧化硅栅极电介质用氧化物/氮化物/氧化物堆替代。 使用具有ITO电极的至少一些多晶硅电极是期望的，以允许可以实现氢钝化的入口通道。 像素架构可以通过其他设计选择进一步提高灵敏度。 这些选择中的第一个是在每个像素上并入一个小透镜，使得落在像素上的光尽可能地穿过被ITO覆盖的像素的部分。 像素光灵敏度不仅改善了光通过更透明的ITO电极，而且还因为一些将落在LOD区域上并将被丢失的光线被收集。 第二种方法是用于具有彩色滤光片图案的彩色CCD传感器，例如“BAYER”彩色滤光片图案，其名称仅为一个，以便在较不敏感的区域上发生不允许透光的滤色器的重叠 的像素，其是被多晶硅电极覆盖的区域。 为了正确操作，需要稍微修改垂直时钟时序。

    Orientation sensing apparatus for radiation imaging system
    2.
    发明授权
    Orientation sensing apparatus for radiation imaging system 有权
    辐射成像系统定向感测装置

    公开(公告)号：US07744279B2

    公开(公告)日：2010-06-29

    申请号：US11924715

    申请日：2007-10-26

    申请人： Michael D. Heath ,  Yawcheng Lo ,  Teresa M. Levy ,  James Doran

    发明人： Michael D. Heath ,  Yawcheng Lo ,  Teresa M. Levy ,  James Doran

    IPC分类号： A61B6/08

    CPC分类号： A61B6/08 ,  A61B6/4291 ,  A61B6/4405 ,  A61B6/547 ,  A61B6/583 ,  A61B6/587 ,  A61B2562/0219 ,  G03B42/02

    摘要： A radiation imaging system includes a radiation head with a radiation source and an adjustable angular orientation. A radiation image detection device has a photostimulable medium that records an image according to radiation emitted from the radiation source. A measurement sensor apparatus, preferably inertial, is coupled sequentially to the photostimulable medium to provide three-dimensional data for determining the angular orientation of the photostimulable medium and to the radiation source for determining its angular orientation. There is at least one indicator responsive to the orientation data from the measurement sensor apparatus for indicating an orientation adjustment of the radiation source is needed in at least one direction.

    摘要翻译： 辐射成像系统包括具有辐射源和可调角度取向的辐射头。 辐射图像检测装置具有根据从辐射源发射的辐射记录图像的可光激励介质。 优选惯性的测量传感器装置被顺序耦合到光刺激介质，以提供用于确定可光激励介质和辐射源的角取向的三维数据，以确定其角度定向。 至少一个指示器响应来自测量传感器装置的取向数据，用于指示在至少一个方向上需要放射源的取向调整。

    POSITION SENSING APPARATUS FOR RADIATION IMAGING SYSTEM
    3.
    发明申请
    POSITION SENSING APPARATUS FOR RADIATION IMAGING SYSTEM 有权
    放射成像系统的位置感测装置

    公开(公告)号：US20080130837A1

    公开(公告)日：2008-06-05

    申请号：US11924715

    申请日：2007-10-26

    申请人： Michael D. Heath ,  Yawcheng Lo ,  Teresa M. Levy ,  James Doran

    发明人： Michael D. Heath ,  Yawcheng Lo ,  Teresa M. Levy ,  James Doran

    IPC分类号： A61B6/08

    CPC分类号： A61B6/08 ,  A61B6/4291 ,  A61B6/4405 ,  A61B6/547 ,  A61B6/583 ,  A61B6/587 ,  A61B2562/0219 ,  G03B42/02

    摘要： A radiation imaging system includes a radiation head with a radiation source and an adjustable angular orientation. A radiation image detection device has a photostimulable medium that records an image according to radiation emitted from the radiation source. An measurement sensor apparatus, preferably inertial, is coupled to the photostimulable medium to provide three-dimensional data for determining the orientation of the photostimulable medium. There is at least one indicator responsive to the orientation data from the measurement sensor apparatus for indicating an orientation adjustment of the radiation source is needed in at least one direction.

    摘要翻译： 辐射成像系统包括具有辐射源和可调角度取向的辐射头。 辐射图像检测装置具有根据从辐射源发射的辐射记录图像的可光激励介质。 优选惯性的测量传感器装置耦合到光刺激介质以提供用于确定可光刺激介质的取向的三维数据。 至少一个指示器响应来自测量传感器装置的取向数据，用于指示在至少一个方向上需要放射源的取向调整。