公开(公告)号：US07421357B2

公开(公告)日：2008-09-02

申请号：US10887827

申请日：2004-07-12

申请人： Makoto Ono ,  Yohei Asakawa

发明人： Makoto Ono ,  Yohei Asakawa

IPC分类号： G06F19/00 ,  G01R31/26

CPC分类号： H01L22/20 ,  G06T7/0004 ,  G06T2207/30148 ,  Y02P90/86

摘要： An operation unit executes a process for calling to a main memory first data representative of a result of equipment QC applied to a production unit. A process for reading out to the main memory an amount of change in failure in accordance with particle numbers calculated for individual defect sizes from second inspection data representative of a result of equipment QC is applied to the production unit. Electrical test data of a product processed by the production unit during a period inclusive of the time that the second inspection is carried outis also read to the main memory. A process is also executed for using the amount of change in failure in accordance with the calculated particle numbers and the particle numbers for individual sizes determined from the first inspection data to determine an impact on the product by particles generated in the production equipment when the first inspection data is detected.

摘要翻译： 操作单元执行用于向主存储器调用代表应用于生产单元的设备QC的结果的第一数据的处理。 对于生产单元，将向根据第二检查数据计算出的各个缺陷尺寸的粒子数量的故障量的变化量写入主存储器的处理被应用于生产单元。 在包括执行第二次检查的时间段期间由生产单元处理的产品的电气测试数据也被读取到主存储器。 还执行一个处理，以根据从第一检查数据确定的计算的粒子数和个体大小的粒子数量来使用故障变化量，以确定在生产设备中产生的颗粒对产品的影响时，当第一 检测数据。

公开(公告)号：US20050021268A1

公开(公告)日：2005-01-27

申请号：US10887827

申请日：2004-07-12

申请人： Makoto Ono ,  Yohei Asakawa

发明人： Makoto Ono ,  Yohei Asakawa

IPC分类号： G05B19/418 ,  G06T7/00 ,  H01L21/02 ,  H01L21/66 ,  G06F19/00

CPC分类号： H01L22/20 ,  G06T7/0004 ,  G06T2207/30148 ,  Y02P90/86

摘要： An operation unit executes a process for calling to a main memory first data representative of a result of equipment QC applied to a production unit, a process for reading out to the main memory an amount of changing of failure number in accordance with particle numbers calculated for individual defect sizes from second inspection data representative of a result of equipment QC applied to the production unit and electrical test data of a product processed by the production unit during a period inclusive of time that the second inspection is carried out, and a process for using the amount of changing of failure number in accordance with the calculated particle numbers and the particle numbers for individual sizes determined from the first inspection data to determine an impact on the product by particles generated in the production equipment at time that the first inspection data is detected.

摘要翻译： 操作单元执行对主存储器的第一数据的调用处理，第一数据表示应用于生产单元的设备QC的结果，根据对于主存储器计算的粒子数量，向主存储器读出故障数量的变化量的处理 来自表示生产单元的设备QC的结果的第二检查数据和由生产单元在包括进行第二次检查的时间段内处理的产品的电气测试数据的单独缺陷尺寸以及使用 根据计算出的粒子数和根据第一检查数据确定的个体大小的粒子数量来改变故障次数的量，以确定在检测到第一检查数据时在生产设备中产生的颗粒对产品的影响 。

公开(公告)号：US08726801B2

公开(公告)日：2014-05-20

申请号：US12959524

申请日：2010-12-03

申请人： Yohei Asakawa ,  Toshiya Teramae

发明人： Yohei Asakawa ,  Toshiya Teramae

IPC分类号： B30B15/00

CPC分类号： B30B15/14 ,  B21D22/00 ,  B30B15/26

摘要： There is provided a controlling technique for a servo press capable of optimal forming for handling variability in a sheet thickness and material property of a workpiece and for handling each workpiece. A controlling device for controlling a servo press in accordance with a slide motion data includes: measurement equipment for measuring a forming state of a workpiece, attached to a die for forming the workpiece; a measurement result receiving portion for receiving a measurement result sent from the measurement equipment; and a slide motion data changing portion for changing a slide motion data for forming the same workpiece at scheduled measuring time in accordance with the measurement result received by the measurement result receiving portion.

摘要翻译： 提供了一种用于伺服压力机的控制技术，该伺服压力机能够最佳地形成用于处理工件的板厚度和材料特性以及处理每个工件的可变性。 根据滑动运动数据控制伺服压力机的控制装置包括：测量装置，用于测量安装在用于形成工件的模具上的工件的成形状态; 测量结果接收部分，用于接收从测量设备发送的测量结果; 以及滑动运动数据改变部分，用于根据由测量结果接收部分接收到的测量结果，在预定的测量时间改变用于形成相同工件的滑动运动数据。

公开(公告)号：US20110132208A1

公开(公告)日：2011-06-09

申请号：US12959524

申请日：2010-12-03

申请人： Yohei Asakawa ,  Toshiya Teramae

发明人： Yohei Asakawa ,  Toshiya Teramae

IPC分类号： B30B1/00 ,  B30B13/00

CPC分类号： B30B15/14 ,  B21D22/00 ,  B30B15/26

摘要： There is provided a controlling technique for a servo press capable of optimal forming for handling variability in a sheet thickness and material property of a workpiece and for handling each workpiece. A controlling device for controlling a servo press in accordance with a slide motion data includes: measurement equipment for measuring a forming state of a workpiece, attached to a die for forming the workpiece; a measurement result receiving portion for receiving a measurement result sent from the measurement equipment; and a slide motion data changing portion for changing a slide motion data for forming the same workpiece at scheduled measuring time in accordance with the measurement result received by the measurement result receiving portion.

摘要翻译： 提供了一种用于伺服压力机的控制技术，该伺服压力机能够最佳地形成用于处理工件的板厚度和材料特性以及处理每个工件的可变性。 根据滑动运动数据控制伺服压力机的控制装置包括：测量装置，用于测量安装在用于形成工件的模具上的工件的成形状态; 测量结果接收部分，用于接收从测量设备发送的测量结果; 以及滑动运动数据改变部分，用于根据由测量结果接收部分接收到的测量结果，在预定的测量时间改变用于形成相同工件的滑动运动数据。

公开(公告)号：US06753494B2

公开(公告)日：2004-06-22

申请号：US10118171

申请日：2002-04-09

申请人： Yohei Asakawa ,  Hideaki Onozuka ,  Motohiro Kikuchi ,  Yoshio Koguchi ,  Masato Kobayashi ,  Masaya Takahashi ,  Shigeru Kikuchi

发明人： Yohei Asakawa ,  Hideaki Onozuka ,  Motohiro Kikuchi ,  Yoshio Koguchi ,  Masato Kobayashi ,  Masaya Takahashi ,  Shigeru Kikuchi

IPC分类号： H01H3366

CPC分类号： H01H33/664 ,  H01H1/0206 ,  H01H11/048 ,  H01H33/6643

摘要： An electrode comprises an electrode main body having a porosity, and the conductivity of the electrode main body at its part ranging from the arc running face to a stated depth is made higher than the conductivity at the section or the conductivity at the part ranging from the back surface to a stated depth. This brings about an improvement in circuit-break performance of a circuit breaker and also prevents the arc running face of the electrode main body from deteriorating.

摘要翻译： 电极包括具有孔隙率的电极主体，并且电极主体在其从电弧运行面到所述深度的范围内的导电性高于该部分处的导电性或部分范围内的电导率 背面到规定的深度。 这导致断路器的断路性能的提高，并且还防止电极主体的电弧运行面恶化。

公开(公告)号：US20050195396A1

公开(公告)日：2005-09-08

申请号：US11066121

申请日：2005-02-24

申请人： Makoto Ono ,  Yohei Asakawa ,  Hisafumi Iwata ,  Kanako Harada

发明人： Makoto Ono ,  Yohei Asakawa ,  Hisafumi Iwata ,  Kanako Harada

IPC分类号： G01N21/956 ,  G01R31/303 ,  G06T1/00 ,  G06T7/00 ,  H01L21/00 ,  H01L21/66 ,  G01B11/00

CPC分类号： G01N21/9501 ,  G01N21/95684 ,  G01R31/2894 ,  H01L22/12 ,  H01L22/20

摘要： A program is provided for setting efficiently, and with precision, the inspection conditions of an inspection device that detects particles and deformed patterns in or on products such as semiconductor integrated circuits that are manufactured by simultaneously forming a plurality of products on a single substrate. In particular, the system achieves greater efficiency of the setting of cell comparison regions and the setting of non-inspection regions. Input processing of a product type code, input processing of chip size and configuration information, reading processing of circuit layout data, extraction processing of repeated pattern region coordinates, extraction processing of sparse region coordinates and circuit pattern condition registration processing are sequentially executed.

公开(公告)号：US06928375B2

公开(公告)日：2005-08-09

申请号：US10411785

申请日：2003-04-10

申请人： Makoto Ono ,  Yohei Asakawa ,  Hisafumi Iwata ,  Kanako Harada

发明人： Makoto Ono ,  Yohei Asakawa ,  Hisafumi Iwata ,  Kanako Harada

IPC分类号： G01N21/956 ,  G01R31/303 ,  G06T1/00 ,  G06T7/00 ,  H01L21/00 ,  H01L21/66 ,  G06F19/00

CPC分类号： G01N21/9501 ,  G01N21/95684 ,  G01R31/2894 ,  H01L22/12 ,  H01L22/20

摘要： A program is provided for setting efficiently, and with precision, the inspection conditions of an inspection device that detects particles and deformed patterns in or on products such as semiconductor integrated circuits that are manufactured by simultaneously forming a plurality of products on a single substrate. In particular, the system achieves greater efficiency of the setting of cell comparison regions and the setting of non-inspection regions. Input processing of a product type code, input processing of chip size and configuration information, reading processing of circuit layout data, extraction processing of repeated pattern region coordinates, extraction processing of sparse region coordinates and circuit pattern condition registration processing are sequentially executed.

摘要翻译： 提供了一种程序，用于精确地设置检测装置的检查条件，该检查装置检测在通过在单个基板上同时形成多个产品而制造的半导体集成电路等产品中或其上产生的变形图案。 特别地，该系统实现了细胞比较区域的设置和非检查区域的设置的更高的效率。 顺序地执行产品类型代码的输入处理，芯片尺寸和配置信息的输入处理，电路布局数据的读取处理，重复模式区域坐标的提取处理，稀疏区域坐标的提取处理和电路图案状态注册处理。