Abstract:
A plasma generation apparatus according to the present invention includes an electrode cell and a housing that encloses an electrode cell. The electrode cell includes a first electrode, a second electrode facing the first electrode with interposition of a discharge space therebetween, and dielectrics arranged on main surfaces of the electrodes. The plasma generation apparatus further includes a pipe passage configured to directly supply a source gas from the outside of the housing to the discharge space without being connected to a space within the housing where the electrode cell is not arranged.
Abstract:
A gas pipe integrated block includes a plurality of internal pipe paths. The plurality of internal pipe paths are connected to a nitrogen-free ozone generator in which a photocatalytic material for generating ozone is applied to a discharge surface, a controller (an MFC, a gas filter, and an APC), a raw material gas supply port, and an ozone gas output port. Thereby, a raw material gas input pipe path extending from the raw material gas supply port through the APC to the nitrogen-free ozone gas generator, and an ozone gas output pipe path extending from the nitrogen-free ozone generator through the gas filter and the MFC to the ozone gas output port, are formed in an integrated unit.
Abstract:
An ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.
Abstract:
This invention provides a new photocatalyst material producing apparatus and photocatalyst material producing method that can produce a large quantity of photocatalyst material of high quality by a chemical reaction in light high-field plasma in a highly oxidative high-concentration ozone medium state, instead of systems to produce a photocatalyst material by PVD and CVD, which are conventional dry deposition methods.In a photocatalyst material producing method and photocatalyst material producing apparatus according to this invention, a pair of facing electrodes are provided via a dielectric material in a discharge gap where gas mainly containing oxygen gas is supplied, and an AC voltage is applied between the electrodes to generate dielectric barrier discharge (silent discharge or creeping discharge) in the discharge gap. Thus, oxygen gas containing ozone gas is created and a metal or metal compound is modified to a photocatalyst material by the dielectric barrier discharge.
Abstract:
A compact, inexpensive, large-capacity ozone generator with increased ease of apparatus maintenance. An ozone power supply includes an n-phase inverter for obtaining an AC voltage having a predetermined frequency and outputting an n-phase AC voltage waveform; n reactors and an n-phase transformer for converting an n-phase AC voltage to a high AC voltage; n high-voltage terminals for outputting the n-phase high AC voltage; and a low-voltage terminal having a common potential. Ozone generator units are electrically divided into n pieces within a discharge chamber. Each ozone generator unit includes n high-voltage electrode terminals and one low-voltage electrode terminal, common to all ozone generator units. Each ozone generator unit supports an n-phase AC discharge to generate ozone.
Abstract:
An ozone generating apparatus including a discharge assembly having a common earth electrode (2) and high-voltage electrodes (3) disposed in opposition to each other with disk-like dielectric members (300) being interposed therebetween for generating electric discharge by applying a high voltage across the electrodes. A gas containing oxygen is supplied to discharge spaces (5) defined between the electrodes for generating ozone under the action of electric discharge. The discharge assembly includes a plurality of discharge cells (10a, 10b, 10c) constituted by disposing at least one of the dielectric member and the high-voltage electrode in a corresponding number relative to the earth electrode in common. A plurality of discharge assemblies are stacked and secured together to constitute a block A plurality of blocks are stacked and secured together to constitute a module. An ozone generating apparatus of a large capacity easy to effectuate assembling and maintenance is realized in a compact structure.
Abstract:
A metal vapor laser apparatus is provided with a buffer gas and a laser medium are enclosed in a tube and the gas is utilized as an excitation or ionization medium in the tube. The metal vapor laser apparatus comprises molecules consisting of a plurality of elements and mixed by at least 0.1% in the gas enclosed in the tube and a gas having a molecular weight lighter than that of neon mixed by at least 0.1% in the gas enclosed in the tube.
Abstract:
In the present invention, particularly, means for removing moisture contained in a raw material gas is provided in a raw material gas supply part so that the amount of moisture contained in the raw material gas that is supplied to an ozone gas supply system is reduced, and additionally an ozone gas output flow rate management unit is provided that is configured to receive a plurality of ozone gas outputs from a plurality of nitrogen-free ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation on a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.
Abstract:
An apparatus for producing high-concentration ozone gas has a plurality of adsorption/desorption columns and a plurality of valves capable of switching opening/closing of the passage of gas flowing into or out of the adsorption/desorption columns, such that each of the adsorption/desorption columns can performs ozone adsorption processing, evacuation processing or desorption processing. At least two of the adsorption/desorption columns are placed in a serial cycle arrangement to constitute a main adsorption/desorption column group, and one or more of the other adsorption/desorption columns is placed in parallel with the main adsorption/desorption column group to constitute an auxiliary adsorption/desorption column. The auxiliary adsorption/desorption column performs desorption processing during a period in which none of the adsorption/desorption columns of the main adsorption/desorption column group is performing desorption processing.
Abstract:
An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having a wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.