公开(公告)号：US06291796B1

公开(公告)日：2001-09-18

申请号：US08434175

申请日：1995-05-01

申请人： YongFeng Lu ,  Yoshinobu Aoyagi

发明人： YongFeng Lu ,  Yoshinobu Aoyagi

IPC分类号： B23K2600

CPC分类号： B08B7/0042 ,  B23K26/066

摘要： An apparatus for dry cleaning a surface includes a laser generator, a laser beam homogenizer, an aperture and a lens that are controlled by a CPU. The laser is preferably a KrF excimer laser although any laser capable of generating a pulsed output in the ultraviolet spectrum may be used. The lens is preferably a plano-convex lens. Articles to be cleaned are placed on a conveyor that transports the article through the laser beam. The CPU can store parameters for optimizing removal of a particular contaminant. These parameters may include the frequency of the pulse beam generated by the laser, the shape of the aperture, the position of the lens is controlled by a stage, and the speed of the conveyor belt.

摘要翻译： 用于干洗表面的设备包括由CPU控制的激光发生器，激光束均化器，孔径和透镜。 尽管可以使用能够在紫外光谱中产生脉冲输出的任何激光器，但是激光器优选为KrF准分子激光器。 透镜优选为平凸透镜。 要清洁的物品放置在通过激光束传送物品的输送机上。 CPU可以存储用于优化去除特定污染物的参数。 这些参数可以包括由激光器产生的脉冲光束的频率，孔的形状，透镜的位置由一个台阶控制，以及传送带的速度。

公开(公告)号：US06828524B2

公开(公告)日：2004-12-07

申请号：US10083832

申请日：2002-02-27

申请人： Minghui Hong ,  Wen Dong Song ,  Yongfeng Lu

发明人： Minghui Hong ,  Wen Dong Song ,  Yongfeng Lu

IPC分类号： B23K2600

CPC分类号： B41J2/16517 ,  H05K3/26

摘要： This invention relates to a method and apparatus for removing surface contamination on a flexible circuit 34 for an inkjet printer cartridge by pulsed laser irradiation in air. The contamination 3 around and inside the tiny inkjet nozzles 4 can be completely removed without any damage on the flexible circuit 34 by the laser irradiation. The cleaning mechanisms are laser-induced ablation of the contamination and fast momentum transferring from the laser beam to the contamination materials. Compared with chemical solution cleaning and plasma etching, this technique has high throughput and does not cause flexible circuit damage, due to the fact that there are no water and chemical solutions involved in the process. Meanwhile, the laser irradiation is only limited in a small area around the tiny inkjet nozzles 4. There is no laser interaction with the thin conductive circuit 34.

摘要翻译： 本发明涉及通过脉冲激光照射在空气中去除用于喷墨打印机墨盒的柔性电路34上的表面污染物的方法和装置。 可以通过激光照射在微型喷墨嘴4周围和内部的污染物3完全去除而不会对柔性电路34造成任何损坏。 清洁机制是激光诱导的污染消融和从激光束传递到污染物质的快速动量。 与化学溶液清洗和等离子体蚀刻相比，该技术具有高通量，并且由于在该过程中没有涉及水和化学溶液的事实，不会导致柔性电路损坏。 同时，激光照射仅在微小喷墨喷嘴4周围的小区域中受到限制。与薄导电电路34没有激光相互作用。

公开(公告)号：US06822189B2

公开(公告)日：2004-11-23

申请号：US10090409

申请日：2002-03-04

申请人： Minghui Hong ,  Yongfeng Lu

发明人： Minghui Hong ,  Yongfeng Lu

IPC分类号： B23K2636

CPC分类号： B41M5/24 ,  B23K26/08 ,  B23K26/082 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/42 ,  B23K2103/50 ,  B23K2103/52 ,  B41M5/26 ,  B41M5/38221 ,  C03C17/002 ,  C03C17/09 ,  C03C23/0025 ,  C03C2218/32 ,  C23C14/048 ,  C23C14/28

摘要： A method of laser marking, suitable for the marking of hard transparent materials without causing microcracking, includes arranging a sample of target material and a sample of markable material such that they are spaced apart; directing irradiation having an energy fluence above the ablation threshold of the target material onto the target material so that some of it is ablated and thrown onto a surface of the markable material; and subjecting the surface of the markable material to irradiation having an energy fluence below the ablation threshold of the markable material to induce an interaction between the ablated material and the surface which marks the surface of the ablated material. Different colours of mark can be obtained by using different target materials, and the tone of the mark can be controlled as desired. Apparatus for implementing the method permits control of the method in real time.

摘要翻译： 一种适用于标记硬质透明材料而不引起显微裂纹的激光标记方法包括：将目标材料样品和可标记材料样品排列成间距; 将具有高于目标材料的消融阈值的能量注量的照射引导到目标材料上，使得其中的一些被烧蚀并投掷到可标记材料的表面上; 并且将可标记材料的表面经受低于可标记材料的消融阈值的能量注入的照射，以引起消融材料和标记烧蚀材料表面的表面之间的相互作用。 可以通过使用不同的目标材料获得不同颜色的标记，并且可以根据需要控制标记的色调。 用于实现该方法的装置允许实时地控制该方法。

公开(公告)号：US06753500B2

公开(公告)日：2004-06-22

申请号：US10078720

申请日：2002-02-19

申请人： Kaidong Ye ,  Chengwu An ,  Minghui Hong ,  Yongfeng Lu

发明人： Kaidong Ye ,  Chengwu An ,  Minghui Hong ,  Yongfeng Lu

IPC分类号： B23K2600

CPC分类号： H01L21/78 ,  B23K26/0853 ,  B23K26/38 ,  B23K2101/40

摘要： The invention relates to a method and apparatus for cutting a substrate using laser irradiation. A laser beam is scanned over a substrate. The beam ablates a first layer of the substrate. The beam is then refocused onto the newly revealed second layer and a further pass is performed. The process is repeated until complete separation occurs. The method and apparatus are particularly suitable for singulation of IC packages.

摘要翻译： 本发明涉及一种使用激光照射切割基板的方法和装置。 在衬底上扫描激光束。 光束消融基片的第一层。 然后将光束重新聚焦到新露出的第二层上，并进行另一遍。 重复该过程直到发生完全分离。 该方法和装置特别适用于IC封装的分离。

公开(公告)号：US20200087216A1

公开(公告)日：2020-03-19

申请号：US16557698

申请日：2019-08-30

申请人： Bai Cui ,  Fei Wang ,  Yongfeng Lu ,  Michael Nastasi

发明人： Bai Cui ,  Fei Wang ,  Yongfeng Lu ,  Michael Nastasi

IPC分类号： C04B41/00 ,  C04B41/45

摘要： Systems for and methods for improving mechanical properties of ceramic material are provided. The system comprises a heat source for heating the ceramic material to a temperature greater than a brittle-to-ductile transition temperature of the ceramic material; a probe for mounting the ceramic material and configured to extend the ceramic material into the heat source; a plasma-confining medium and a sacrificial layer disposed between the ceramic material and the plasma-confining medium; and an energy pulse generator such as a laser pulse generator. The sacrificial layer is utilized to form plasma between the ceramic material and the plasma-confining medium. The method comprises heating ceramic material to a temperature greater than a brittle-to-ductile transition temperature of the ceramic material and subjecting the ceramic material to energy pulses via a sacrificial layer and a plasma-confining medium whereby a plasma of the sacrificial coating forms between the ceramic material and a plasma-confining medium.