公开(公告)号：US07796368B2

公开(公告)日：2010-09-14

申请号：US10580815

申请日：2004-11-26

申请人： Hiroyuki Kotani ,  Hirotaki Takei ,  Yoshifumi Ibuki ,  Hiroaki Oichi

发明人： Hiroyuki Kotani ,  Hirotaki Takei ,  Yoshifumi Ibuki ,  Hiroaki Oichi

IPC分类号： H02H3/00

CPC分类号： H01J37/32174 ,  H01J37/32935 ,  H03H7/40 ,  H05H1/46

摘要： A high-frequency power supply system includes an anomaly detector 3 which detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source 1. The anomaly detector 3 includes a first detector 21 which detects a voltage value Vf of a high-frequency forward wave, a second detector 22 which detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculator 23 and a differentiator 24 which calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determiner 25 which determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detector 3 outputs an anomaly detection signal to the high-frequency power source 1, high-frequency power source 1 stops its power output operation.

摘要翻译： 高频电源系统包括异常检测器3，其从高频电源1的输出端A检测在负载L侧的电路中发生的异常。异常检测器3包括第一检测器 21检测高频正向波的电压值Vf，检测高频反射波的电压值Vr的第二检测器22，计算反射系数微分值d＆Ggr的反射系数计算器23和微分器24 ; / dt和反射波电压值Vr，以及基于反射系数微分值d＆Ggr; / dt确定异常的发生的异常判定器25。 当异常检测器3向高频电源1输出异常检测信号时，高频电源1停止其电力输出动作。

公开(公告)号：US20100176904A1

公开(公告)日：2010-07-15

申请号：US12732773

申请日：2010-03-26

申请人： Yoshifumi IBUKI ,  Shigeki Amadatsu ,  Tomohiko Kitano ,  Shuji Omae

发明人： Yoshifumi IBUKI ,  Shigeki Amadatsu ,  Tomohiko Kitano ,  Shuji Omae

IPC分类号： H01F38/30

CPC分类号： G01R15/181 ,  G01R15/142 ,  G01R15/16

摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.

摘要翻译： 电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中 交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

公开(公告)号：US07714594B2

公开(公告)日：2010-05-11

申请号：US11627703

申请日：2007-01-26

申请人： Yoshifumi Ibuki ,  Shigeki Amadatsu ,  Tomohiko Kitano ,  Shuji Omae

发明人： Yoshifumi Ibuki ,  Shigeki Amadatsu ,  Tomohiko Kitano ,  Shuji Omae

IPC分类号： G01R27/26 ,  G01R1/20

CPC分类号： G01R15/181 ,  G01R15/142 ,  G01R15/16

摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.

摘要翻译： 电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中 交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

公开(公告)号：US20070285089A1

公开(公告)日：2007-12-13

申请号：US11687973

申请日：2007-03-19

申请人： Yoshifumi IBUKI ,  Shuji OMAE ,  Hideo ITO

发明人： Yoshifumi IBUKI ,  Shuji OMAE ,  Hideo ITO

IPC分类号： G01R33/00

CPC分类号： G01R15/18 ,  G01R15/142 ,  G01R15/181

摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.

摘要翻译： 电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中 交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

公开(公告)号：US08686711B2

公开(公告)日：2014-04-01

申请号：US13048104

申请日：2011-03-15

申请人： Ryohei Tanaka ,  Yoshifumi Ibuki

发明人： Ryohei Tanaka ,  Yoshifumi Ibuki

IPC分类号： G01R23/02

CPC分类号： H01J37/32183 ,  H01J37/32935

摘要： A method for calibrating a high frequency measuring device so as to accurately measure plasma processing parameters within a chamber. A calibration parameter is calculated from a first set of three reference loads measured by a high frequency measurement device. A second calibration parameter is calculated from S parameters measured between a connection point where the high-frequency measuring device is connected and the inside of the chamber of a plasma processing device. A second set of three reference loads, which include the impedance previously calculated and encompass a range narrower than that encompassed by the first set of three reference loads, is measured with the reference loads in the chamber. Another calibration parameter is calculated from the measured impedances of the second set of three reference loads measured by the high- frequency measuring device, and the true values of those impedances, and a detected voltage signal and a detected current signal are calibrated using the above calibration parameters.

摘要翻译： 一种用于校准高频测量装置以精确测量腔室内的等离子体处理参数的方法。 根据由高频测量装置测量的第一组三个参考载荷来计算校准参数。 从连接高频测量装置的连接点与等离子体处理装置的室内测量的S参数计算出第二校准参数。 使用腔室中的参考负载测量第二组三个参考负载，其包括先前计算的阻抗并且包含比由第一组三个参考负载包围的范围窄的范围。 从由高频测量装置测量的第二组三个参考载荷的测量阻抗计算出另一个校准参数，并且使用上述校准校准那些阻抗的真实值，检测到的电压信号和检测到的电流信号 参数。

公开(公告)号：US20110234201A1

公开(公告)日：2011-09-29

申请号：US13048104

申请日：2011-03-15

申请人： Ryohei TANAKA ,  Yoshifumi IBUKI

发明人： Ryohei TANAKA ,  Yoshifumi IBUKI

IPC分类号： G01R23/02

CPC分类号： H01J37/32183 ,  H01J37/32935

摘要： A method is provided for calibrating a high-frequency, measuring device so as to accurately measure high-frequency parameters within a chamber. A calibration parameter is calculated from impedance of a first set of three reference loads measured by a high-frequency measuring device and the true values of those impedances. A calibration parameter is calculated from an S parameter measured between a connection point where the high-frequency measuring device is connected and the inside of the chamber of a plasma processing device. An impedance within the chamber is calculated from a voltage signal and a current signal calibrated using the above calibration parameters. A second set of three reference loads, which include the impedance calculated in Step 5 and encompass a range narrower than that encompassed by the first set of three reference loads, is determined. Another calibration parameter is calculated from impedances of the second set of three reference loads measured by the high-frequency measuring device and the true values of those impedances, and a detected voltage signal and a detected current signal are calibrated using the above calibration parameters.

摘要翻译： 提供了一种用于校准高频测量装置以便精确地测量腔室内的高频参数的方法。 从由高频测量装置测量的第一组三个参考载荷的阻抗和这些阻抗的真实值的阻抗来计算校准参数。 根据在连接高频测量装置的连接点与等离子体处理装置的室内之间测量的S参数来计算校准参数。 从电压信号和使用上述校准参数校准的电流信号计算室内的阻抗。 第二组三个参考载荷，其包括在步骤5中计算的阻抗并且包含比由第一组三个参考载荷所包围的阻抗窄的范围。 通过由高频测量装置测量的第二组三个参考载荷的阻抗和这些阻抗的真实值的阻抗计算另一个校准参数，并且使用上述校准参数校准检测到的电压信号和检测到的电流信号。

公开(公告)号：US20090058398A1

公开(公告)日：2009-03-05

申请号：US12201295

申请日：2008-08-29

申请人： Yoshifumi IBUKI

发明人： Yoshifumi IBUKI

IPC分类号： G01R1/20

CPC分类号： G01R15/181

摘要： A printed board, includes: a first shield portion, configured to reduce an influence of an electric field in combination with a casing accommodating the printed board, at least a part of the first shield portion being formed with a plurality of through holes; and a second shield portion, configured to reduce the influence of the electric field in combination with the casing, at least a part of the second shield portion being formed with a plurality of through holes, wherein the second shield portion is arranged alongside of the first shield portion.

摘要翻译： 一种印刷电路板，包括：第一屏蔽部分，被配置为减少与容纳印刷电路板的外壳组合的电场的影响，所述第一屏蔽部分的至少一部分形成有多个通孔; 以及第二屏蔽部，被配置为减少与所述壳体组合的电场的影响，所述第二屏蔽部分的至少一部分形成有多个通孔，其中所述第二屏蔽部分沿着所述第一屏蔽部分 屏蔽部分。

公开(公告)号：US08134816B2

公开(公告)日：2012-03-13

申请号：US12834579

申请日：2010-07-12

申请人： Hiroyuki Kotani ,  Hirotaki Takei ,  Yoshifumi Ibuki ,  Hiroaki Oichi

发明人： Hiroyuki Kotani ,  Hirotaki Takei ,  Yoshifumi Ibuki ,  Hiroaki Oichi

IPC分类号： H02H3/00

CPC分类号： H01J37/32174 ,  H01J37/32935 ,  H03H7/40 ,  H05H1/46

摘要： A high-frequency power supply system includes an anomaly detector 3 which detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source 1. The anomaly detector 3 includes a first detector 21 which detects a voltage value Vf of a high-frequency forward wave, a second detector 22 which detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculator 23 and a differentiator 24 which calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determiner 25 which determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detector 3 outputs an anomaly detection signal to the high-frequency power source 1, high-frequency power source 1 stops its power output operation.

摘要翻译： 高频电源系统包括异常检测器3，其从高频电源1的输出端A检测在负载L侧的电路中发生的异常。异常检测器3包括第一检测器 21检测高频正向波的电压值Vf，检测高频反射波的电压值Vr的第二检测器22，计算反射系数微分值d＆Ggr的反射系数计算器23和微分器24 ; / dt和反射波电压值Vr，以及基于反射系数微分值d＆Ggr; / dt确定异常的发生的异常判定器25。 当异常检测器3向高频电源1输出异常检测信号时，高频电源1停止其电力输出动作。

公开(公告)号：US20110115466A1

公开(公告)日：2011-05-19

申请号：US13014288

申请日：2011-01-26

申请人： Yoshifumi IBUKI ,  Shuji OMAE ,  Hideo ITO

发明人： Yoshifumi IBUKI ,  Shuji OMAE ,  Hideo ITO

IPC分类号： G01R19/00

CPC分类号： G01R15/18 ,  G01R15/142 ,  G01R15/181

摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.

摘要翻译： 电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中 交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

公开(公告)号：US20100277843A1

公开(公告)日：2010-11-04

申请号：US12834579

申请日：2010-07-12

申请人： Hiroyuki KOTANI ,  Hirotaka Takei ,  Yoshifumi Ibuki ,  Hiroaki Oichi

发明人： Hiroyuki KOTANI ,  Hirotaka Takei ,  Yoshifumi Ibuki ,  Hiroaki Oichi

IPC分类号： H02H3/00 ,  G01R21/06

CPC分类号： H01J37/32174 ,  H01J37/32935 ,  H03H7/40 ,  H05H1/46

摘要： A high-frequency power supply system includes an anomaly detector 3 which detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source 1. The anomaly detector 3 includes a first detector 21 which detects a voltage value Vf of a high-frequency forward wave, a second detector 22 which detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculator 23 and a differentiator 24 which calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determiner 25 which determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detector 3 outputs an anomaly detection signal to the high-frequency power source 1, high-frequency power source 1 stops its power output operation.

摘要翻译： 高频电源系统包括异常检测器3，其从高频电源1的输出端A检测在负载L侧的电路中发生的异常。异常检测器3包括第一检测器 21检测高频正向波的电压值Vf，检测高频反射波的电压值Vr的第二检测器22，计算反射系数微分值d＆Ggr的反射系数计算器23和微分器24 ; / dt和反射波电压值Vr，以及基于反射系数微分值d＆Ggr; / dt确定异常的发生的异常判定器25。 当异常检测器3向高频电源1输出异常检测信号时，高频电源1停止其电力输出动作。