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公开(公告)号：US20070047271A1
公开(公告)日：2007-03-01
申请号：US11467229
申请日：2006-08-25
申请人： Hiroyuki KOTANI , Hirotaka TAKEI
发明人： Hiroyuki KOTANI , Hirotaka TAKEI
IPC分类号： H02M1/12
CPC分类号： H02M7/53806
摘要： A high-frequency power apparatus including: an oscillator, outputting an oscillating signal, an output level of the oscillating signal being variable; an amplifier, amplifying the oscillating signal output from the oscillator and outputting high-frequency power; a DC power supply, supplying DC power to the amplifier, an output level of the DC power being variable; a high-frequency power measuring unit, measuring a power value of the high-frequency power at an output terminal of the high-frequency power apparatus and outputting the measured power value as a high-frequency power measured value; a DC power measuring unit, measuring a power value of the DC power supplied to the amplifier and outputting the measured DC power value as a DC power measured value; a first controller, controlling the output level of the oscillating signal to be output from the oscillator such that the high-frequency power measured value is substantially equal to an output power set value; and a second controller, controlling the output level of the DC power to be supplied from the DC power supply to the amplifier such that a calculated value obtained by dividing the high-frequency power measured value by the DC power measured value is substantially equal to a predetermined efficiency set value.
摘要翻译： 一种高频电力设备，包括：振荡器，输出振荡信号，所述振荡信号的输出电平是可变的; 放大器，放大从振荡器输出的振荡信号并输出高频功率; 直流电源，向放大器提供直流电力，直流电力的输出电平是可变的; 高频功率测量单元，测量高频电力设备的输出端子处的高频功率的功率值，并输出测量的功率值作为高频功率测量值; 直流功率测量单元，测量提供给放大器的直流电力的功率值，并将所测量的直流功率值输出为直流功率测量值; 第一控制器，控制从振荡器输出的振荡信号的输出电平，使得高频功率测量值基本上等于输出功率设定值; 以及第二控制器，控制从DC电源向放大器提供的DC电力的输出电平，使得通过将高频功率测量值除以DC功率测量值而获得的计算值基本上等于 预定效率设定值。
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公开(公告)号：US20080048632A1
公开(公告)日：2008-02-28
申请号：US11793923
申请日：2005-12-27
IPC分类号： G05F1/10
CPC分类号： H02M3/3372
摘要： A high frequency power supply includes a DC source unit (19) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit (13) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit (14) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit (13) utilizing the DC voltage output by the DC source unit (19), an output voltage detection unit (21) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit (14), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit (22) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit (19) based on the detection result from the output voltage detection unit (21).
摘要翻译： 高频电源包括输出具有与目标电压对应的输出电平的直流电压Vdc的直流电源单元（19），输出具有与目标电压对应的输出电平的高频电压信号的振荡单元（13） 电源，包括多个放大元件的放大单元（14），并且利用由DC源单元（19）输出的DC电压来放大并输出由振荡单元（13）输出的高频电压信号，输出电压 检测单元（21），其检测放大单元（14）中的放大元件的放大侧端子之间的电压的幅度，或者与放大侧（14）之间的电压的振幅成比例的电压的幅度 端子，以及目标电压决定单元（22），其基于来自所述DC电源单元（19）的检测结果来决定要由DC源单元（19）输出的DC源电压Vdc的目标值 输出电压检测单元（21）。
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公开(公告)号：US07630220B2
公开(公告)日：2009-12-08
申请号：US11793923
申请日：2005-12-27
CPC分类号： H02M3/3372
摘要： A high frequency power supply includes a DC source unit (19) that outputs a DC voltage Vdc having an output level corresponding to a target voltage, an oscillation unit (13) that outputs a high frequency voltage signal having an output level corresponding to a target power, an amplification unit (14) that includes a plurality of amplifying elements, and amplifies and outputs the high frequency voltage signal output by the oscillation unit (13) utilizing the DC voltage output by the DC source unit (19), an output voltage detection unit (21) that detects an amplitude of the voltage between the amplified-side terminals of the amplifying elements in the amplification unit (14), or an amplitude of a voltage that is proportional to the amplitude of the voltage between the amplified-side terminals, and a target voltage decision unit (22) that decides a target value of the DC source voltage Vdc to be outputted by the DC source unit (19) based on the detection result from the output voltage detection unit (21).
摘要翻译： 高频电源包括输出具有与目标电压对应的输出电平的直流电压Vdc的直流电源单元（19），输出具有与目标电压对应的输出电平的高频电压信号的振荡单元（13） 电源，包括多个放大元件的放大单元（14），并且利用由DC源单元（19）输出的DC电压来放大并输出由振荡单元（13）输出的高频电压信号，输出电压 检测单元（21），其检测放大单元（14）中的放大元件的放大侧端子之间的电压的幅度，或者与放大侧（14）之间的电压的振幅成比例的电压的幅度 端子和目标电压判定单元（22），其基于来自输出电压det的检测结果来决定要由DC源单元（19）输出的DC源电压Vdc的目标值 排出单元（21）。
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公开(公告)号：US07489206B2
公开(公告)日：2009-02-10
申请号：US11360491
申请日：2006-02-24
申请人： Hiroyuki Kotani , Hirotaka Takei , Ryohei Tanaka , Hiroshi Matoba
发明人： Hiroyuki Kotani , Hirotaka Takei , Ryohei Tanaka , Hiroshi Matoba
IPC分类号： H03B1/00
CPC分类号： H03H7/40
摘要： A high-frequency power device including: an oscillator; a high-frequency power supplier; a reflection coefficient calculator; a discharge signal output unit; and a frequency controller, wherein the frequency controller: instructs the oscillator to oscillate the oscillation signal at a first oscillation frequency for the period of time while a discharge signal is not in a state showing that the discharge has been commenced or in a state where the discharge is regarded as having been commenced; then instructs the oscillator to change the first oscillation frequency to a second oscillation frequency immediately after the discharge signal changes into the states; and then controls the oscillation frequency so that the absolute value is made small.
摘要翻译： 一种高频功率器件，包括：振荡器; 高频电源; 反射系数计算器 放电信号输出单元; 以及频率控制器，其中，所述频率控制器：指示所述振荡器在一段时间内以第一振荡频率振荡所述振荡信号，而放电信号不处于表示所述放电已经开始的状态，或者所述频率控制器 卸货被视为已经开始; 然后指示振荡器在放电信号变为状态之后立即将第一振荡频率改变为第二振荡频率; 然后控制振荡频率使绝对值变小。
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公开(公告)号：US07221102B2
公开(公告)日：2007-05-22
申请号：US10772934
申请日：2004-02-05
IPC分类号： H05B41/16
CPC分类号： H02M1/32 , H02M2001/0048 , Y02B70/1491
摘要： The invention relates to a HF power supply device including an oscillator (11) outputting a HF signal, an amplifier (12) amplifying the output of the oscillator for supplying a HF output to a load, and a DC power supply (13) to supply a DC power voltage to the amplifier (11). The power supply device further includes a loss calculator (18) calculating a loss in the amplifier (11), a first controller (19) controlling the output of the power supply (13) and a second controller (20) controlling the output of the oscillator (11) or amplifier (12). When the calculated loss by the calculator (18) exceeds a predetermined loss set value, the first controller (19) lowers the output power voltage of the power supply (13) to make the calculated loss equal to the loss set value. When the calculated loss is no greater than the loss set value, the first controller (19) maintains the output power voltage at an appropriate DC voltage set value, while the second controller (20) controls the output of the oscillator (11) or amplifier (12) so that the HF output to the load from the amplifier (13) approaches a HF output set value.
摘要翻译： 本发明涉及一种包括输出HF信号的振荡器（11）和放大用于向负载提供HF输出的振荡器的输出的放大器（12）的HF电源装置，以及供给 到放大器（11）的直流电源电压。 电源装置还包括计算放大器（11）中的损耗的损耗计算器（18），控制电源（13）输出的第一控制器（19）和控制电源输出端的第二控制器（20） 振荡器（11）或放大器（12）。 当计算器（18）的计算出的损失超过预定的损耗设定值时，第一控制器（19）降低电源（13）的输出电压，使计算出的损耗等于损耗设定值。 当计算出的损耗不大于损耗设定值时，第一控制器（19）将输出电源电压维持在适当的直流电压设定值，而第二控制器（20）控制振荡器（11）或放大器 （12），使得从放大器（13）到负载的HF输出接近HF输出设定值。
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公开(公告)号：US20060220573A1
公开(公告)日：2006-10-05
申请号：US11360491
申请日：2006-02-24
申请人： Hiroyuki Kotani , Hirotaka Takei , Ryohei Tanaka , Hiroshi Matoba
发明人： Hiroyuki Kotani , Hirotaka Takei , Ryohei Tanaka , Hiroshi Matoba
IPC分类号： H01J7/24
CPC分类号： H03H7/40
摘要： A high-frequency power device including: an oscillator; a high-frequency power supplier; a reflection coefficient calculator; a discharge signal output unit; and a frequency controller, wherein the frequency controller: instructs the oscillator to oscillate the oscillation signal at a first oscillation frequency for the period of time while a discharge signal is not in a state showing that the discharge has been commenced or in a state where the discharge is regarded as having been commenced; then instructs the oscillator to change the first oscillation frequency to a second oscillation frequency immediately after the discharge signal changes into the states; and then controls the oscillation frequency so that the absolute value is made small.
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公开(公告)号：US20050259450A1
公开(公告)日：2005-11-24
申请号：US10772934
申请日：2004-02-05
CPC分类号： H02M1/32 , H02M2001/0048 , Y02B70/1491
摘要： The invention relates to a HF power supply device including an oscillator (11) outputting a HF signal, an amplifier (12) amplifying the output of the oscillator for supplying a HF output to a load, and a DC power supply (13) to supply a DC power voltage to the amplifier (11). The power supply device further includes a loss calculator (18) calculating a loss in the amplifier (11), a first controller (19) controlling the output of the power supply (13) and a second controller (20) controlling the output of the oscillator (11) or amplifier (12). When the calculated loss by the calculator (18) exceeds a predetermined loss set value, the first controller (19) lowers the output power voltage of the power supply (13) to make the calculated loss equal to the loss set value. When the calculated loss is no greater than the loss set value, the first controller (19) maintains the output power voltage at an appropriate DC voltage set value, while the second controller (20) controls the output of the oscillator (11) or amplifier (12) so that the HF output to the load from the amplifier (13) approaches a HF output set value.
摘要翻译： 本发明涉及一种包括输出HF信号的振荡器（11）和放大用于向负载提供HF输出的振荡器的输出的放大器（12）的HF电源装置，以及供给 到放大器（11）的直流电源电压。 电源装置还包括计算放大器（11）中的损耗的损耗计算器（18），控制电源（13）输出的第一控制器（19）和控制电源输出端的第二控制器（20） 振荡器（11）或放大器（12）。 当计算器（18）的计算出的损失超过预定的损耗设定值时，第一控制器（19）降低电源（13）的输出电压，使计算出的损耗等于损耗设定值。 当计算出的损耗不大于损耗设定值时，第一控制器（19）将输出电源电压维持在适当的直流电压设定值，而第二控制器（20）控制振荡器（11）或放大器 （12），使得从放大器（13）到负载的HF输出接近HF输出设定值。
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公开(公告)号：US07265528B2
公开(公告)日：2007-09-04
申请号：US11467229
申请日：2006-08-25
申请人： Hiroyuki Kotani , Hirotaka Takei
发明人： Hiroyuki Kotani , Hirotaka Takei
IPC分类号： G05F1/40
CPC分类号： H02M7/53806
摘要： A high-frequency power apparatus including: an oscillator, outputting an oscillating signal, an output level of the oscillating signal being variable; an amplifier, amplifying the oscillating signal output from the oscillator and outputting high-frequency power; a DC power supply, supplying DC power to the amplifier, an output level of the DC power being variable; a high-frequency power measuring unit, measuring a power value of the high-frequency power at an output terminal of the high-frequency power apparatus and outputting the measured power value as a high-frequency power measured value; a DC power measuring unit, measuring a power value of the DC power supplied to the amplifier and outputting the measured DC power value as a DC power measured value; a first controller, controlling the output level of the oscillating signal to be output from the oscillator such that the high-frequency power measured value is substantially equal to an output power set value; and a second controller, controlling the output level of the DC power to be supplied from the DC power supply to the amplifier such that a calculated value obtained by dividing the high-frequency power measured value by the DC power measured value is substantially equal to a predetermined efficiency set value.
摘要翻译： 一种高频电力设备，包括：振荡器，输出振荡信号，所述振荡信号的输出电平是可变的; 放大器，放大从振荡器输出的振荡信号并输出高频功率; 直流电源，向放大器提供直流电力，直流电力的输出电平是可变的; 高频功率测量单元，测量高频电力设备的输出端子处的高频功率的功率值，并输出测量的功率值作为高频功率测量值; 直流功率测量单元，测量提供给放大器的直流电力的功率值，并将所测量的直流功率值输出为直流功率测量值; 第一控制器，控制从振荡器输出的振荡信号的输出电平，使得高频功率测量值基本上等于输出功率设定值; 以及第二控制器，控制从DC电源向放大器提供的DC电力的输出电平，使得通过将高频功率测量值除以DC功率测量值而获得的计算值基本上等于 预定效率设定值。
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公开(公告)号：US20100277843A1
公开(公告)日：2010-11-04
申请号：US12834579
申请日：2010-07-12
CPC分类号： H01J37/32174 , H01J37/32935 , H03H7/40 , H05H1/46
摘要： A high-frequency power supply system includes an anomaly detector 3 which detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source 1. The anomaly detector 3 includes a first detector 21 which detects a voltage value Vf of a high-frequency forward wave, a second detector 22 which detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculator 23 and a differentiator 24 which calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determiner 25 which determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detector 3 outputs an anomaly detection signal to the high-frequency power source 1, high-frequency power source 1 stops its power output operation.
摘要翻译： 高频电源系统包括异常检测器3，其从高频电源1的输出端A检测在负载L侧的电路中发生的异常。异常检测器3包括第一检测器 21检测高频正向波的电压值Vf，检测高频反射波的电压值Vr的第二检测器22，计算反射系数微分值d＆Ggr的反射系数计算器23和微分器24 ; / dt和反射波电压值Vr，以及基于反射系数微分值d＆Ggr; / dt确定异常的发生的异常判定器25。 当异常检测器3向高频电源1输出异常检测信号时，高频电源1停止其电力输出动作。
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公开(公告)号：US20070121267A1
公开(公告)日：2007-05-31
申请号：US10580815
申请日：2004-11-26
IPC分类号： H02H3/00
CPC分类号： H01J37/32174 , H01J37/32935 , H03H7/40 , H05H1/46
摘要： A high-frequency power supply system includes an anomaly detector 3 which detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source 1. The anomaly detector 3 includes a first detector 21 which detects a voltage value Vf of a high-frequency forward wave, a second detector 22 which detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculator 23 and a differentiator 24 which calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determiner 25 which determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detector 3 outputs an anomaly detection signal to the high-frequency power source 1, high-frequency power source 1 stops its power output operation.
摘要翻译： 高频电源系统包括异常检测器3，其从高频电源1的输出端A检测在负载L侧的电路中发生的异常。异常检测器3包括第一检测器 21检测高频正向波的电压值Vf，检测高频反射波的电压值Vr的第二检测器22，计算反射系数微分值dGamma的反射系数计算器23和微分器24 / dt与反射波电压值Vr，以及异常判定器25，其基于反射系数微分值dGamma / dt确定异常的发生。 当异常检测器3向高频电源1输出异常检测信号时，高频电源1停止其电力输出动作。
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