摘要:
A resource allocator allocates a plurality of resources among a plurality of tasks within a process system. The resource allocator includes a monitoring controller for monitoring one or more characteristics associated with at least one application process, the resources, and the tasks. The resource allocator also includes a model of the process system representing mathematically the resources and the tasks and defining relationships among related resources and tasks. The resource allocator further includes a resource allocation controller for operating the model in response to the monitored characteristics and allocating the resources among the tasks. In addition, the resource allocator includes a graphical user interface for identifying the resources and flows between at least some of the resources. The graphical user interface includes at least one virtual queue associated with at least one of the resources and identifying one or more items to be processed by the at least one resource.
摘要:
A system and method are provided for manufacturing workpieces, such as metal articles like sputtering target, the system comprising: comparing one or more physical or chemical values of a respective one of a plurality of metal target blanks to one or more comparable values of at least one desired criterion; selecting one of the metal target blanks from a plurality of metal target blanks as a work-in-progress; assigning a serial route for the work-in-progress; processing the work-in-progress by translating the work-in-progress from note to node with an automated transport, after completion of the events at each node; rejecting or accepting the work-in-progress as a metal target by evaluating a result of at least one event of the one or more respective events to be completed at, at least one of the plurality of nodes.
摘要:
The invention discloses methodology for qualitatively extending and exploiting the utility of presently known manufacturing control charts. The method introduces a separate control mechanism comprising establishing confidence intervals to already existing control limits. The confidence intervals, in turn, can be used in presently known control charts to take into account an otherwise uncertainty in a generation of the control limits themselves, thereby increasing the accuracy and robustness of decisions based on the use of the control charts.
摘要:
A fixture and method is provided for gripping an article, such as a sputtering target. The fixture comprises a base, a first set of contact rollers, and a second set of contact rollers, wherein at least one of the first set and the second set are adjustably positioned relative to the other of the first set and the second set on the base. The contact rollers can be configured as v-grooved wheels that will only touch chamfered portions of an outer diameter of the sputtering target when the contact rollers are clamped against the sputtering target. At least one of the first set and the second set of contact rollers can be pivotally mounted on a slide, with the slide being adjustably positioned on the base of the fixture.
摘要:
A transfer schedule SA and a transfer schedule SB for an A lot and a B lot different from each other are generated on a transfer control table, the succeeding transfer schedule SB is moved ahead in the direction of a time axis within a range over which it does not interfere with the transfer schedule SA for the preceding A lot to make the start timing for the succeeding transfer schedule SB become earlier than the end timing for the transfer schedule for the preceding A lot, so that the transfer schedule SA and the transfer schedule SB are executed in parallel, thereby improving the throughput a wafer transfer process.
摘要:
A scheduling system for preparing an operational plan for a production process which is carried out by using a computer system with an improved easier programming method which does not require a human operator to have knowledge of computer programming. In the system, the operation to be scheduled is inputted as a plurality of input element rows or letter rows on a display field using a computer, a CRT display device, and various pointing devices, such as keyboard, mouse, etc. Function blocks which can assign predetermined program operations are located on the display field, and are used in combination, and are relocated to specify the operation contents and the operation order or the program, to thereby complete the logics for the scheduling.
摘要:
A system and method are provided for manufacturing a sputtering target. The system is preferably automated. Sub systems of the manufacturing system include a robotic part handling sub system, a weighing sub system adapted to measure the weight of a part to be manufactured into a sputtering target, and a machining sub system adapted to finish machine a part to be manufactured into a sputtering target. The system can further include a cleaning sub system adapted to clean a part to be manufactured into a sputtering target, an inspection sub system adapted to measure dimensions of a part to be manufactured into a sputtering target, and a feedback control sub system adapted to provide control signals to one or more of the robotic handling sub system, the weighing sub system, the cleaning sub system, and the inspection sub system to control processing performed by one or more of the sub systems.
摘要:
A fixture and method is provided for gripping an article, such as a sputtering target. The fixture comprises a base, a first set of contact rollers, and a second set of contact rollers, wherein at least one of the first set and the second set are adjustably positioned relative to the other of the first set and the second set on the base. The contact rollers can be configured as v-grooved wheels that will only touch chamfered portions of an outer diameter of the sputtering target when the contact rollers are clamped against the sputtering target. At least one of the first set and the second set of contact rollers can be pivotally mounted on a slide, with the slide being adjustably positioned on the base of the fixture.
摘要:
A system and method of creating and using a graphical task scheduler. A Graphical User Interface (GUI) allows a user to graphically build a real time flow task scheduler by providing a “click & drag” functional palette which contains graphical flow chart elements. By creating this graphical flow chart, the user is able to associate a plant layout, or any subpart of the entire plant, to its associated mathematical model. With a graphical flow chart, the user can define one or more exit branches for each task. For tasks with more than one exit branch, the user can specify the conditions causing the sequence to use each branch. Once the flow chart is set up, it can be used as a sequence editor or scheduler. The sequence editor defines the sequence of tasks that will be performed by an on-line application, such as optimization, and also allows scheduling of the on-line application at specific times or periodic intervals. The scheduler controls the running of each sequence based on the scheduling information. Once a plant has been optimized by the graphical task scheduler, the optimized data may be used to control plant operations.
摘要:
A process flow (information) (260) has information about treatment of each process, a flow number of each the process, and information (270, 280) indicating whether an execution order of each the process is adjustable. Either of the order adjustable information (270) to indicate that the execution order is adjustable and the order unadjustable information (280) to indicate that the execution order is unadjustable, is supplied to each the process in the flag status, for example. Under a production management system (200), extraction means (220) extracts, by referring to the process flow (260), order adjustable processes each being unexecuted and having the order adjustable information (270), and adjustment means (230) adjusts the execution order of the extracted processes.