Abstract:
A reading device includes a position reference member and a reader. The position reference member has a reference pattern that includes a line extending in a prescribed direction. The position reference member is configured to relatively move in a direction orthogonal to the prescribed direction. The reader includes a plurality of sensor chips, each of the sensor chips including a plurality of pixels. The reference pattern corresponds to each of the sensor chips of the reader.
Abstract:
A reading device includes a position reference member and a reader. The position reference member has a reference pattern that includes a line extending in a prescribed direction. The position reference member is configured to relatively move in a direction orthogonal to the prescribed direction. The reader includes a plurality of sensor chips, each of the sensor chips including a plurality of pixels. The reference pattern corresponds to each of the sensor chips of the reader.
Abstract:
A method of manufacturing a semiconductor device includes forming desired semiconductor elements in a major surface region of a semiconductor substrate, and ion-implanting a selected element into the semiconductor substrate from the major surface of the substrate to form an ion-implanted layer by the implanted element. A heat treatment is performed to the ion-implanted substrate, causing the ion-implanted layer to getter contaminant heavy metals.