Method of manufacturing a semiconductor device by mega-electron volt ion
implantation
    3.
    发明授权
    Method of manufacturing a semiconductor device by mega-electron volt ion implantation 失效
    通过MEGA-ELECTRON电压植入制造半导体器件的方法

    公开(公告)号:US5098852A

    公开(公告)日:1992-03-24

    申请号:US548548

    申请日:1990-07-05

    CPC classification number: H01L21/3221 H01L21/26513

    Abstract: A method of manufacturing a semiconductor device includes forming desired semiconductor elements in a major surface region of a semiconductor substrate, and ion-implanting a selected element into the semiconductor substrate from the major surface of the substrate to form an ion-implanted layer by the implanted element. A heat treatment is performed to the ion-implanted substrate, causing the ion-implanted layer to getter contaminant heavy metals.

    Abstract translation: 一种制造半导体器件的方法包括在半导体衬底的主表面区域形成期望的半导体元件,并且从所述衬底的主表面离子注入到所述半导体衬底中的所选择的元件,以通过所述植入的所述衬底形成离子注入层 元件。 对离子注入的基板进行热处理,使离子注入层吸收污染的重金属。

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