Apparatus and Method for Deposition Organic Compounds, and Substrate Treating Facility With the Apparatus
    1.
    发明申请
    Apparatus and Method for Deposition Organic Compounds, and Substrate Treating Facility With the Apparatus 审中-公开
    用于沉积有机化合物的装置和方法,以及用该装置的基板处理设备

    公开(公告)号:US20090269492A1

    公开(公告)日:2009-10-29

    申请号:US12084624

    申请日:2006-11-02

    IPC分类号: C23C16/44 C23C16/54

    摘要: An apparatus for depositing organic compounds is provided to deposit predetermined organic films on a substrate. The apparatus includes a deposition chamber, a support member provided inside the deposition chamber and supporting the substrate to make a deposition surface of the substrate face downwardly, a vaporizer installing portion in which an organic vaporizer is installed to vaporize organic compounds to the deposition surface of the substrate, and a vaporizer replacing portion disposed adjacent to the vaporizer installing portion to replace the organic vaporizer. According to the apparatus, organic vaporizers for vaporizing organic compounds are replaced automatically.

    摘要翻译: 提供了一种用于沉积有机化合物的装置以在基板上沉积预定的有机膜。 该装置包括沉积室,设置在沉积室内部并支撑基板以使基板的沉积表面朝下的支撑构件,蒸发器安装部分,其中安装有机蒸发器以将有机化合物蒸发到沉积表面 基板和邻近蒸发器安装部分设置的蒸发器更换部分以替换有机蒸发器。 根据该装置,用于汽化有机化合物的有机蒸发器被自动替换。

    SYSTEM FOR PREPARING SILICA AEROGEL POWDER
    3.
    发明申请
    SYSTEM FOR PREPARING SILICA AEROGEL POWDER 有权
    制备二氧化硅气泡粉的系统

    公开(公告)号:US20120244040A1

    公开(公告)日:2012-09-27

    申请号:US13161989

    申请日:2011-06-16

    IPC分类号: B01J8/00

    摘要: A system for preparing silica aerogel powders. The system includes a material supplier, a mixer, a drier and a recoverer. The material supplier transmitting de-ionized water, water glass, an organosilane compound, an inorganic acid and at least one organic solvent. Some of organic solvents are mixed and transmitted to the mixer and tramining organic solvent is transmitted to the mixer. The mixer mixes the materials transmitted from the material supplier so as to generate silica hydrogel. The drier dries the silica hydrogel so as to generate silica aerogel powders. The recoverer recovers some vaporized materials of the materials used in the mixer and the drier.

    摘要翻译: 一种制备二氧化硅气凝胶粉末的系统。 该系统包括材料供应商,搅拌机,干燥机和回收机。 发送去离子水,水玻璃,有机硅烷化合物,无机酸和至少一种有机溶剂的材料供应商。 将一些有机溶剂混合并传输到混合器中,并将有机溶剂的有机溶剂传输到混合器中。 混合器将从材料供应商传送的材料混合以产生二氧化硅水凝胶。 干燥器干燥二氧化硅水凝胶以产生二氧化硅气凝胶粉末。 回收器回收混合器和干燥器中使用的材料的一些汽化材料。

    METHOD OF PREPARING SILICA AEROGEL POWDER
    4.
    发明申请
    METHOD OF PREPARING SILICA AEROGEL POWDER 有权
    制备二氧化硅气泡粉的方法

    公开(公告)号:US20120225003A1

    公开(公告)日:2012-09-06

    申请号:US13099936

    申请日:2011-05-03

    IPC分类号: C01B33/158

    CPC分类号: C01B33/158 C01B33/166

    摘要: A method of preparing silica aero-gel powders having a short preparation time and stable preparation processes. In the method, the silica aerogel powders are generated by using a water glass solution, an inorganic acid, an organosilane compound and an organic solvent. The method includes dispersion-solution generating, gelating and solvent exchanging and drying. In the dispersion-solution generating, a dispersion solution is generated by dispersing the water glass solution and the organosilane compound in the organic solvent. In the gelating and solvent exchanging, silica hydrogel is generated by adding the inorganic acid to the dispersion solution and simultaneously performing gelating and solvent-exchanging. In the drying, the silica aerogel powders are generated by drying the silica hydro-gel.

    摘要翻译: 一种制备具有较短制备时间和稳定制备方法的二氧化硅气凝胶粉末的方法。 在该方法中,通过使用水玻璃溶液,无机酸,有机硅烷化合物和有机溶剂来生成二氧化硅气凝胶粉末。 该方法包括分散溶液产生,凝胶化和溶剂交换和干燥。 在分散液生成中,通过将水玻璃溶液和有机硅烷化合物分散在有机溶剂中而产生分散液。 在凝胶化和溶剂交换中,通过向分散液中加入无机酸,同时进行凝胶化和溶剂交换,生成二氧化硅水凝胶。 在干燥过程中,通过干燥二氧化硅水凝胶来生成二氧化硅气凝胶粉末。

    Apparatus for trapping carbon nanotube and system and method for producing the carbon nanotube
    5.
    发明授权
    Apparatus for trapping carbon nanotube and system and method for producing the carbon nanotube 有权
    用于捕获碳纳米管的装置及其制造方法和碳纳米管的制造方法

    公开(公告)号:US07935175B2

    公开(公告)日:2011-05-03

    申请号:US11889230

    申请日:2007-08-10

    IPC分类号: B03C1/32

    摘要: This invention relates to a carbon nanotube producing system. A carbon nanotube producing system includes a reaction tube in which a metal catalyst and a carbon-containing gas are supplied and carbon nanotube grows on the metal catalyst by pyrolysis; an exhaust line along which a gas including the carbon nanotube grown on the metal catalyst is exhausted from the reaction tube; and a carbon nanotube trapping apparatus installed on the exhaust line and configured to trap the carbon nanotube grown on the metal catalyst by using a magnetic force.

    摘要翻译: 本发明涉及碳纳米管制造系统。 碳纳米管制造系统包括供给金属催化剂和含碳气体的反应管,碳纳米管通过热解在金属催化剂上生长; 将从金属催化剂生长的碳纳米管的气体从反应管排出的排气管, 以及碳纳米管捕集装置,其安装在所述排气管上并且被构造成通过使用磁力捕获在所述金属催化剂上生长的所述碳纳米管。

    Apparatus for processing substrate
    6.
    发明授权
    Apparatus for processing substrate 有权
    基板处理装置

    公开(公告)号:US07918940B2

    公开(公告)日:2011-04-05

    申请号:US11342610

    申请日:2006-01-31

    IPC分类号: C23C16/00

    摘要: In a substrate processing apparatus for forming thin layers on a substrate used for an organic light emitting diode, the apparatus includes a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided with a transferring guide installed thereinside, and a substrate supporter for supporting the substrate moves along the transferring guide in or between the chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired.

    摘要翻译: 在用于有机发光二极管的基板上形成薄层的基板处理装置中,该装置包括掩模附着室,沉积室和掩模分离室。 掩模附着室,沉积室和掩模拆卸室设置有安装在其上的传送导向器,用于支撑基板的基板支撑件沿着传送导向件在室内或室之间移动。 因此,可以减少处理基板和设备的区域的时间。 而且,这些室分组成一个或多个,并且闸门安装在分组室之间,用于打开和关闭分组室之间的路径。 因此,当任何一个腔室被修复时,腔室可以被连续地保持在真空状态。

    Method of preparing silica aerogel powder
    7.
    发明授权
    Method of preparing silica aerogel powder 有权
    制备二氧化硅气凝胶粉末的方法

    公开(公告)号:US08961919B2

    公开(公告)日:2015-02-24

    申请号:US13099936

    申请日:2011-05-03

    CPC分类号: C01B33/158 C01B33/166

    摘要: A method of preparing silica aero-gel powders having a short preparation time and stable preparation processes. In the method, the silica aerogel powders are generated by using a water glass solution, an inorganic acid, an organosilane compound and an organic solvent. The method includes dispersion-solution generating, gelating and solvent exchanging and drying. In the dispersion-solution generating, a dispersion solution is generated by dispersing the water glass solution and the organosilane compound in the organic solvent. In the gelating and solvent exchanging, silica hydrogel is generated by adding the inorganic acid to the dispersion solution and simultaneously performing gelating and solvent-exchanging. In the drying, the silica aerogel powders are generated by drying the silica hydro-gel.

    摘要翻译: 一种制备具有较短制备时间和稳定制备方法的二氧化硅气凝胶粉末的方法。 在该方法中,通过使用水玻璃溶液,无机酸,有机硅烷化合物和有机溶剂来生成二氧化硅气凝胶粉末。 该方法包括分散溶液产生,凝胶化和溶剂交换和干燥。 在分散液生成中,通过将水玻璃溶液和有机硅烷化合物分散在有机溶剂中而产生分散液。 在凝胶化和溶剂交换中,通过向分散液中加入无机酸,同时进行凝胶化和溶剂交换,生成二氧化硅水凝胶。 在干燥过程中,通过干燥二氧化硅水凝胶来生成二氧化硅气凝胶粉末。

    METHOD OF FABRICATING SUPERHYDROPHOBIC SILICA CHAIN POWDERS
    8.
    发明申请
    METHOD OF FABRICATING SUPERHYDROPHOBIC SILICA CHAIN POWDERS 审中-公开
    制造超级二氧化硅粉末粉末的方法

    公开(公告)号:US20100233061A1

    公开(公告)日:2010-09-16

    申请号:US12749266

    申请日:2010-03-29

    IPC分类号: C01B33/152

    CPC分类号: C01B33/166

    摘要: Disclosed herein is a method of fabricating superhydrophobic silica-based powder, comprising: forming a hydrogel by adding an organosilane compound having alkaline pH and an inorganic acid to a non-ion-exchanged water glass solution, which is a precursor, to form a mixed solution and then surface-modifying and gelating the mixed solution; dipping the hydrogel into a nonpolar solvent to solvent-exchange the hydrogel and remove sodium ions (Na+) therefrom; and drying the solvent-exchanged hydrogel through a fluidized bed drying method under normal pressure or reduced pressure to fabricate aerogel powder. According to the method of fabricating a superhydrophobic silica-based powder of the present invention, the process thereof is very simple and economical. Therefore, the present invention is expected to be industrially important.

    摘要翻译: 本文公开了一种制造超疏水性二氧化硅基粉末的方法,其包括:通过向作为前体的非离子交换水玻璃溶液中加入具有碱性pH和无机酸的有机硅烷化合物形成水凝胶,以形成混合 溶液,然后对混合溶液进行表面改性和凝胶化; 将水凝胶浸入非极性溶剂中以溶剂交换水凝胶并从其中除去钠离子(Na +); 并在常压或减压下通过流化床干燥方法干燥溶剂交换的水凝胶以制备气凝胶粉末。 根据本发明的超疏水性二氧化硅系粉末的制造方法,其工艺非常简单且经济。 因此,本发明预期在工业上是重要的。

    Apparatus for processing substrate
    9.
    发明申请
    Apparatus for processing substrate 有权
    基板处理装置

    公开(公告)号:US20060174829A1

    公开(公告)日:2006-08-10

    申请号:US11342610

    申请日:2006-01-31

    IPC分类号: B05C11/02 B05C11/11 B05C11/00

    摘要: In a substrate processing apparatus for forming thin layers on a substrate used for an organic light emitting diode, the apparatus includes a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided with a transferring guide installed thereinside, and a substrate supporter for supporting the substrate moves along the transferring guide in or between the chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired.

    摘要翻译: 在用于有机发光二极管的基板上形成薄层的基板处理装置中,该装置包括掩模附着室,沉积室和掩模分离室。 掩模附着室,沉积室和掩模拆卸室设置有安装在其上的传送导向器,用于支撑基板的基板支撑件沿着传送导向件在室内或室之间移动。 因此,可以减少处理基板和设备的区域的时间。 而且,这些室分组成一个或多个,并且闸门安装在分组室之间,用于打开和关闭分组室之间的路径。 因此,当任何一个腔室被修复时,腔室可以被连续地保持在真空状态。

    System for preparing silica aerogel powder
    10.
    发明授权
    System for preparing silica aerogel powder 有权
    制备二氧化硅气凝胶粉体系

    公开(公告)号:US08518335B2

    公开(公告)日:2013-08-27

    申请号:US13161989

    申请日:2011-06-16

    IPC分类号: B01J19/00 C01B33/12

    摘要: A system for preparing silica aerogel powders. The system includes a material supplier, a mixer, a drier and a recoverer. The material supplier transmitting de-ionized water, water glass, an organosilane compound, an inorganic acid and at least one organic solvent. Some of organic solvents are mixed and transmitted to the mixer and tramining organic solvent is transmitted to the mixer. The mixer mixes the materials transmitted from the material supplier so as to generate silica hydrogel. The drier dries the silica hydrogel so as to generate silica aerogel powders. The recoverer recovers some vaporized materials of the materials used in the mixer and the drier.

    摘要翻译: 一种制备二氧化硅气凝胶粉末的系统。 该系统包括材料供应商,搅拌机,干燥机和回收机。 发送去离子水,水玻璃,有机硅烷化合物,无机酸和至少一种有机溶剂的材料供应商。 将一些有机溶剂混合并传输到混合器中,并将有机溶剂的有机溶剂传输到混合器中。 混合器将从材料供应商传送的材料混合以产生二氧化硅水凝胶。 干燥器干燥二氧化硅水凝胶以产生二氧化硅气凝胶粉末。 回收器回收混合器和干燥器中使用的材料的一些汽化材料。