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    Air conditioning system for semiconductor clean room including a chemical filter downstream of a humidifier
    1.
    发明授权
    Air conditioning system for semiconductor clean room including a chemical filter downstream of a humidifier 失效
    半导体洁净室的空调系统，包括加湿器下游的化学过滤器

    公开(公告)号：US5890367A

    公开(公告)日：1999-04-06

    申请号：US899388

    申请日：1997-07-23

    申请人： Nam-hee You ,  Jung-sung Hwang ,  Gee-do Kim ,  Young-jin Han

    发明人： Nam-hee You ,  Jung-sung Hwang ,  Gee-do Kim ,  Young-jin Han

    IPC分类号： F24F3/14 ,  B01D39/14 ,  F24F3/16 ,  F24F7/06 ,  H01L21/02 ,  B01L1/04 ,  F25D17/06

    CPC分类号： F24F3/161 ,  F24F2003/1682

    摘要： An air conditioning system for a semiconductor clean room includes a chemical filter between an air conditioner including a humidifier and a ULPA filter of the clean room, for ionizing chemical impurities using moisture supplied from the humidifier and then adsorbing the ionized chemical impurities by using the chemical filter. The chemical filter is installed downstream of the humidifier, which applies phosphoric acid for the prevention of scale-formation. This downstream location allows the chemical filter to prevent the phosphoric acid from being included in the fresh air as a new chemical impurity, which makes regulation of temperature and humidity of the air possible without having to use a special and expensive pure steam system.

    摘要翻译： 用于半导体洁净室的空调系统包括在包括加湿器的空气调节器和洁净室的ULPA过滤器之间的化学过滤器，用于使用从加湿器供应的水分电离化学杂质，然后通过使用化学品吸附电离的化学杂质 过滤。 化学过滤器安装在加湿器的下游，该加湿器采用磷酸防止结垢形成。 该下游位置允许化学过滤器防止磷酸作为新的化学杂质被包含在新鲜空气中，这使得可以调节空气的温度和湿度，而不必使用特殊和昂贵的纯蒸汽系统。

    REMOTE COMMUNICATION APPARATUS INCLUDING SECURITY FUNCTION AND REMOTE ELECTRIC POWER METERING SYSTEM USING THE SAME
    4.
    发明申请
    REMOTE COMMUNICATION APPARATUS INCLUDING SECURITY FUNCTION AND REMOTE ELECTRIC POWER METERING SYSTEM USING THE SAME 审中-公开
    使用安全功能的远程通信装置和远程电力计量系统

    公开(公告)号：US20120051542A1

    公开(公告)日：2012-03-01

    申请号：US13028436

    申请日：2011-02-16

    申请人： Min Gyu KIM ,  Young Jin HAN

    发明人： Min Gyu KIM ,  Young Jin HAN

    IPC分类号： H04K1/00

    CPC分类号： G01D4/004 ,  H04B2203/5433 ,  Y02B90/242 ,  Y04S20/322

    摘要： There are provided a remote communication apparatus including a security function and a remote electric power metering system using the same. The remote communication apparatus including a security function includes: a security algorithm application unit decrypting a receiving signal received from a communication network in the case in which the receiving signal is an encrypted signal and encrypting a transmitting signal to be transmitted to the communication network; and a protocol unit converting the receiving signal or the receiving signal decrypted by the security algorithm application unit according to a preset communication protocol and generating the transmitting signal according to the preset communication protocol.

    摘要翻译： 提供了包括安全功能的远程通信装置和使用其的远程电力计量系统。 包括安全功能的远程通信装置包括：安全算法应用单元，在接收信号是加密信号的情况下对从通信网络接收的接收信号进行解密，并加密要发送到通信网络的发送信号; 以及协议单元，根据预设的通信协议转换由安全算法应用单元解密的接收信号或接收信号，并根据预设的通信协议生成发送信号。