公开(公告)号：US6037260A

公开(公告)日：2000-03-14

申请号：US76116

申请日：1998-05-12

Applicant: Ming-Shyong Tsai ,  Li-Mei Chen ,  Yue-Chin Yeh ,  Chiu-Chih Hsieh ,  Ying-Tsung Chen

Inventor： Ming-Shyong Tsai ,  Li-Mei Chen ,  Yue-Chin Yeh ,  Chiu-Chih Hsieh ,  Ying-Tsung Chen

IPC: C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  C07K13/00

CPC classification number: C09G1/02 ,  C09K3/1463 ,  Y10T29/47

Abstract: The present invention provides a polishing composition which comprises 100 weight part of water; 0.5 to 20 weight part of boehmite, a hydroxide of aluminum, pseudoboehmite or mixtures thereof; 1 to 50 weight part of aluminum oxide (Al.sub.2 O.sub.3); and 1 to 20 weight part of an acidic solution. The polishing composition of the present invention is a thixotropic fluid and displays satisfactory suspension properties. Therefore, it is very suitable for use as a polishing slurry.

Abstract translation: 本发明提供一种抛光组合物，其包含100重量份的水; 勃姆石0.5〜20重量份，铝氢氧化物，假勃姆石或其混合物; 1〜50重量份的氧化铝（Al2O3）; 和1〜20重量份的酸性溶液。 本发明的研磨用组合物是触变性液体，显示出令人满意的悬浮性。 因此，非常适合用作研磨浆料。