公开(公告)号：US06941812B2

公开(公告)日：2005-09-13

申请号：US10644222

申请日：2003-08-19

申请人： Yukimitsu Sekimori ,  Daiji Uehara

发明人： Yukimitsu Sekimori ,  Daiji Uehara

IPC分类号： G01L9/00 ,  G01L7/00 ,  G01L19/06 ,  H01L29/84

CPC分类号： G01L9/0073 ,  G01L19/0627

摘要： A pressure sensor 10 included an upper substrate 30 having a detection face 30A, a diaphragm 20 provided with a space from the detection substrate 30 and displaceable to and from the upper substrate 30, fixed electrodes 32, 33 provided on the detection face 30A of the upper substrate 30, and a first signal fetching section 22 electrically connected to the diaphragm 20, and the diaphragm 20 is formed by dry-etching single-crystal silicon with the specific resistance lowered to 1.0 Ω·cm or below by mixing dopant lowering the resistance value.

摘要翻译： 压力传感器10包括具有检测面30A的上基板30，从检测基板30设置有空间且能够从上基板30移位的隔膜20，设置在检测面30A上的固定电极32,33 以及与隔膜20电连接的第一信号取出部22，通过将电阻降低到1.0Ω·cm以下的单晶硅进行干法蚀刻而形成，通过混合掺杂剂降低 电阻值。

公开(公告)号：US06192761B1

公开(公告)日：2001-02-27

申请号：US09282802

申请日：1999-03-31

申请人： Yukimitsu Sekimori ,  Seiichi Yokoyama ,  Fumio Kaise

发明人： Yukimitsu Sekimori ,  Seiichi Yokoyama ,  Fumio Kaise

IPC分类号： G01L900

CPC分类号： G01L9/0073

摘要： In a pressure sensor chip (10), an extension (42) is provided on a lower glass (40) and a signal receiving portion (50) of a conductive layer is formed from a surface (42A) of an extension (42) to an upper surface (30B) of an upper glass (30). Accordingly, the signal receiving portion (50) does not touch a circuit substrate when the pressure sensor chip (10) is mounted to the circuit substrate and the like, thereby preventing electric failure such as noise pickup of the signal receiving portion (50). Further, since the signal receiving portion (50) is formed by the conductive layer, no particular space for receiving electric potential from a diaphragm is necessary, thereby enabling size reduction of the pressure sensor chip (10). Since an anodic-bonding electrode (83) is disposed on a border (62) and is cut and removed in separating as the pressure sensor chip (10), visual check is not obstructed and contamination by being peeled-off can be prevented.

摘要翻译： 在压力传感器芯片（10）中，在下玻璃（40）上设置有延伸部（42），并且由延伸部（42）的表面（42A）形成导体层的信号接收部（50） 上玻璃（30）的上表面（30B）。 因此，当将压力传感器芯片（10）安装到电路基板等时，信号接收部分（50）不接触电路基板，从而防止诸如信号接收部分（50）的噪声拾取之类的电气故障。 此外，由于信号接收部分（50）由导电层形成，所以不需要用于从隔膜接收电位的特定空间，从而能够使压力传感器芯片（10）的尺寸减小。 由于阳极结合电极（83）设置在边界（62）上，并且在作为压力传感器芯片（10）的分离中被切割和去除时，目视检查不被阻挡，并且可以防止被剥离的污染。

公开(公告)号：US06097821A

公开(公告)日：2000-08-01

申请号：US969957

申请日：1997-11-25

申请人： Seiichi Yokoyama ,  Hiroji Ito ,  Fumio Kaise ,  Yukimitsu Sekimori

发明人： Seiichi Yokoyama ,  Hiroji Ito ,  Fumio Kaise ,  Yukimitsu Sekimori

IPC分类号： G01L9/12 ,  G01L19/06 ,  H04R19/00 ,  H04R25/00

CPC分类号： H04R19/00

摘要： In an electrostatic capacitance type transducer which has a substrate, a movable electrode confrontingly placed to the substrate in a movable manner through a space, a fixed electrode arranged on a detecting face confronting the movable electrode of the substrate, and a signal receiving portion which is conductive with the fixed electrode and derived from the detecting face of the substrate, the fixed electrode and the signal receiving portion are made of metals which are different with each other in their compositions. That is, the fixed electrode is made of metal which has a high corrosion resistance and is not likely to outbreak a hillock, and the signal receiving portion is made of metal which is easy for bonding. Alternatively, both the fixed electrode and the signal receiving portion are made of titanium. Through this, since the outbreak of the hillock can be prevented, the displacement of the movable electrode can be stably and precisely detected for a long time, and the shortening of the life of the fixed electrode caused by corrosion can be prevented. As to the signal receiving portion, an excellent bonding property can be ensured.

摘要翻译： 在具有基板的静电电容型传感器中，可动电极以可移动的方式通过空间面对放置在基板上，固定电极布置在面对基板的可动电极的检测面上，信号接收部分是 固定电极导电并衍生自基板的检测面，固定电极和信号接收部分由其组成彼此不同的金属制成。 也就是说，固定电极由具有高耐腐蚀性且不易爆发的金属的金属制成，并且信号接收部分由易于接合的金属制成。 或者，固定电极和信号接收部都由钛制成。 由此，由于能够防止小丘的爆发，能够长时间稳定且精确地检测可动电极的位移，能够防止由腐蚀引起的固定电极的寿命缩短。 对于信号接收部，可以确保良好的接合性。

公开(公告)号：US5917264A

公开(公告)日：1999-06-29

申请号：US922507

申请日：1997-09-03

申请人： Naohiko Maruno ,  Seiichi Yokoyama ,  Hiroji Ito ,  Fumio Kaise ,  Yukimitsu Sekimori

发明人： Naohiko Maruno ,  Seiichi Yokoyama ,  Hiroji Ito ,  Fumio Kaise ,  Yukimitsu Sekimori

IPC分类号： G01L9/00 ,  G01L19/06 ,  G01P15/08 ,  G01P15/125 ,  G01L1/14

CPC分类号： G01P15/125 ,  G01L9/0073 ,  G01P15/0802

摘要： The present invention provides an electrostatic capacitance type transducer and a method for producing the same, with the ensured sufficient connecting strength and insulation between a movable electrode and a fixed electrode and smooth production. In the electrostatic capacitance type transducer having: a substrate; a movable electrode placed on the opposite side of a space from the substrate and having displacement in relation to the substrate; and a fixed electrode formed on a detecting face of the substrate which is opposite to the movable electrode, an insulation film is formed on the approximately whole surface, including the fixed electrode, of the detecting face of the substrate, in which the substrate and the movable electrode are connected through the insulation film to each other by means of the anode-contact.

摘要翻译： 本发明提供了一种静电电容型传感器及其制造方法，其确保了可动电极和固定电极之间的足够的连接强度和绝缘性，并且平稳地生产。 在具有：基板的静电电容型传感器中， 位于与所述基板相对的空间的相对侧并具有相对于所述基板的位移的可动电极; 以及形成在与所述可动电极相对的所述基板的检测面上的固定电极，在所述基板的所述检测面的所述检测面的大致整个表面（包括所述固定电极）上形成绝缘膜， 可动电极通过阳极接触通过绝缘膜彼此连接。