公开(公告)号：US20060284083A1

公开(公告)日：2006-12-21

申请号：US10569373

申请日：2004-08-27

申请人： Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Yasushi Minomoto ,  Shigeru Miwa ,  Ken Murayama ,  Yukio Kenbou ,  Yuuichi Yuuichi ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto

发明人： Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Yasushi Minomoto ,  Shigeru Miwa ,  Ken Murayama ,  Yukio Kenbou ,  Yuuichi Yuuichi ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto

IPC分类号： G21K7/00

CPC分类号： G01Q10/06 ,  G01Q30/06 ,  Y10T29/49828

摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.

摘要翻译： 扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。 当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。 通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。