公开(公告)号：US06540833B1

公开(公告)日：2003-04-01

申请号：US09227667

申请日：1999-01-08

Applicant: Gregory M. Gibson ,  Carl W. Newquist ,  John E. Hawes ,  Rene Soliz ,  Samer Mahmoud Kabbani ,  Scott A. Snodgrass ,  Altaf A. Poonawala ,  Darwin R. Frerking ,  Zi-Qin Wang ,  Ocie T. Snodgrass ,  Eric E. Anderson

Inventor： Gregory M. Gibson ,  Carl W. Newquist ,  John E. Hawes ,  Rene Soliz ,  Samer Mahmoud Kabbani ,  Scott A. Snodgrass ,  Altaf A. Poonawala ,  Darwin R. Frerking ,  Zi-Qin Wang ,  Ocie T. Snodgrass ,  Eric E. Anderson

IPC: B05C302

CPC classification number: B05C13/00 ,  B05C5/0245 ,  B05C5/0254 ,  B05C11/1013 ,  B05C11/1015

Abstract: The invention pertains to a coating apparatus and method in which most of the relative movement between a dispensing head and the substrate to be coated is provided by the coating head. The moving head configuration reduces the system footprint and diminishes leveling problems. A powered shuttle mechanism carries a dispensing head above a substrate to be coated while riding on a bearing located underneath the chuck holding the substrate thereby providing rigidity and reducing the system footprint. Chuck support is designed to accommodate anticipated vertical sag in the dispensing head by supporting the chuck at points along its periphery thereby permitting the chuck to sag in conjunction with the dispensing head. The shuttle mechanism is equipped with means for automatically adjusting the height of the dispensing head with respect to substrate to compensate for substrate placement error, substrate dimensional variation, and mechanical drift in the mechanical machine parts. Coating consistency is enhanced using such height adjustment. A part of the apparatus containing the fluid delivery equipment and in communication with the dispensing head may be placed on a cart and removably attached to the rest of the apparatus. There is a utility station comprising equipment for cleaning and priming the dispensing head which may be located on the removable cart. A pump in addition to main remote pumping means may be integrally mounted on the dispensing head to more precisely control fluid flow to the dispensing head. The chuck may be configured to be micro deformable so as to maintain the surface of a substrate upon it at a constant height. Fluid may be dispensed along openings of selected lengths along the length of the dispensing head using die lips attached to the dispensing head or by cutting a plurality of slots in a single dispensing head.

Abstract translation: 本发明涉及一种涂布装置和方法，其中分配头与要涂覆的基底之间的大部分相对运动由涂覆头提供。 移动头配置减少了系统占用空间并减少了调平问题。 动力穿梭机构在被涂覆的基底上方运送分配头，同时骑在位于夹持基底的卡盘下方的轴承上，从而提供刚性并减少系统占地面积。 卡盘支撑件设计成通过在其周边的点处支撑卡盘来适应分配头部中的预期垂直松弛，从而允许卡盘与分配头一起下垂。 穿梭机构配备有用于自动调节分配头相对于基底的高度以补偿机械机器部件中的基板放置误差，基板尺寸变化和机械漂移的装置。 使用这种高度调节可提高涂层的一致性。 包含流体输送设备并与分配头连通的装置的一部分可以放置在推车上并且可移除地附接到装置的其余部分上。 有一个实用工作站，包括用于清洁和启动分配头的设备，该分配头可以位于可移动的推车上。 除了主远程泵送装置之外的泵可以一体地安装在分配头上，以更精确地控制流到分配头的流体。 卡盘可以被配置为可微变形的，以便将基板的表面保持在恒定的高度。 可以使用附接到分配头的模唇或通过在单个分配头中切割多个狭槽沿着分配头的长度沿着选定长度的开口分配流体。

公开(公告)号：US07169229B2

公开(公告)日：2007-01-30

申请号：US10364537

申请日：2003-02-11

Applicant: Gregory M. Gibson ,  Carl W. Newquist ,  John E. Hawes ,  Rene Soliz ,  Samer Mahmoud Kabbani ,  Scott A. Snodgrass ,  Altaf A. Poonawala ,  Darwin R. Frerking ,  Zi-Qin Wang ,  Ocie T. Snodgrass ,  Eric E. Anderson

Inventor： Gregory M. Gibson ,  Carl W. Newquist ,  John E. Hawes ,  Rene Soliz ,  Samer Mahmoud Kabbani ,  Scott A. Snodgrass ,  Altaf A. Poonawala ,  Darwin R. Frerking ,  Zi-Qin Wang ,  Ocie T. Snodgrass ,  Eric E. Anderson

IPC: B05C3/02

CPC classification number: B05C13/00 ,  B05C5/0245 ,  B05C5/0254 ,  B05C11/1013 ,  B05C11/1015

Abstract: The invention pertains to a coating apparatus and method in which most of the relative movement between a dispensing head and the substrate to be coated is provided by the coating head. The moving head configuration reduces the system footprint and diminishes leveling problems. A powered shuttle mechanism carries a dispensing head above a substrate to be coated while riding on a bearing located underneath the chuck holding the substrate thereby providing rigidity and reducing the system footprint. Chuck support is designed to accommodate anticipated vertical sag in the dispensing head by supporting the chuck at points along its periphery thereby permitting the chuck to sag in conjunction with the dispensing head. The shuttle mechanism is equipped with means for automatically adjusting the height of the dispensing head with respect to substrate to compensate for substrate placement error, substrate dimensional variation, and mechanical drift in the mechanical machine parts. Coating consistency is enhanced using such height adjustment. A part of the apparatus containing the fluid delivery equipment and in communication with the dispensing head may be placed on a cart and removably attached to the rest of the apparatus. There is a utility station comprising equipment for cleaning and priming the dispensing head which may be located on the removable cart. A pump in addition to main remote pumping means may be integrally mounted on the dispensing head to more precisely control fluid flow to the dispensing head. The chuck may be configured to be micro deformable so as to maintain the surface of a substrate upon it at a constant height. Fluid may be dispensed along openings of selected lengths along the length of the dispensing head using die lips attached to the dispensing head or by cutting a plurality of slots in a single dispensing head.

Abstract translation: 本发明涉及一种涂布装置和方法，其中分配头与要涂覆的基底之间的大部分相对运动由涂覆头提供。 移动头配置减少了系统占用空间并减少了调平问题。 动力穿梭机构在被涂覆的基底上方运送分配头，同时骑在位于夹持基底的卡盘下方的轴承上，从而提供刚性并减少系统占地面积。 卡盘支撑件设计成通过在其周边的点处支撑卡盘来适应分配头部中的预期垂直松弛，从而允许卡盘与分配头一起下垂。 穿梭机构配备有用于自动调节分配头相对于基底的高度以补偿机械机器部件中的基板放置误差，基板尺寸变化和机械漂移的装置。 使用这种高度调节可提高涂层的一致性。 包含流体输送设备并与分配头连通的装置的一部分可以放置在推车上并且可移除地附接到装置的其余部分上。 有一个实用工作站，包括用于清洁和启动分配头的设备，该分配头可以位于可移动的推车上。 除了主远程泵送装置之外的泵可以一体地安装在分配头上，以更精确地控制流到分配头的流体。 卡盘可以被配置为可微变形的，以便将基板的表面保持在恒定的高度。 可以使用附接到分配头的模唇或通过在单个分配头中切割多个狭槽沿着分配头的长度沿着选定长度的开口分配流体。

公开(公告)号：US06319323B1

公开(公告)日：2001-11-20

申请号：US09227459

申请日：1999-01-08

Applicant: Gregory M. Gibson ,  Altaf A. Poonawala ,  John E. Hawes ,  Darwin R. Frerking ,  Zi-Qin Wang

Inventor： Gregory M. Gibson ,  Altaf A. Poonawala ,  John E. Hawes ,  Darwin R. Frerking ,  Zi-Qin Wang

IPC: B05C1100

CPC classification number: B05C5/0216 ,  B05C11/02

Abstract: The inventive mechanism adjusts a working distance between a tool and a work surface. The provision for automatically setting and adjusting the working distance between two parts of an apparatus, possibly a coating apparatus, permits the mechanism to adjust in real time for unknown and possibly random variations in the dimensions of the work surface, the apparatus supporting the work surface, and imperfect leveling of the tool or the work surface. In a preferred embodiment, the inventive mechanism is used to accurately set and maintain the working distance of a dispenser above a substrate so as to provide that a consistent coating thickness is applied across the substrate. The mechanism preferably employs direct precision distance sensing means independent of the motor of drive means to continuously measure the working distance in real time with a high degree of resolution and accuracy. When the sensor reports that the working distance has deviated from the ideal setting, a control system employs a standard P.I.D. control scheme to precisely restore the ideal working distance. The mechanism may perform the working distance control function using the main or host software, or, more preferably delegate this function to a dedicated processor for the duration of the process during which working distance is being precisely adjusted. The host preferably resumes control of the drive means in the direction of the working distance once the precision adjustment scheme is concluded, and may then perform larger scale motion of the tool using feedback from the position reporting means integral to the motor or drive means.

Abstract translation: 本发明的机构调节工具和工作表面之间的工作距离。 用于自动设定和调节设备的两个部件（可能是涂覆设备）之间的工作距离的设置允许机构实时地调整工作表面的尺寸的未知和可能的随机变化，支撑工作表面的设备 ，以及工具或工作台面的不均匀调平。 在优选实施例中，使用本发明的机构来精确地设置和维持分配器在基板上方的工作距离，以便提供在基板上施加一致的涂层厚度。 该机构优选采用独立于驱动装置的电动机的直接精密距离感测装置，以高分辨率和精确度实时地连续测量工作距离。 当传感器报告工作距离偏离理想设置时，控制系统采用标准P.I.D. 控制方案精确恢复理想的工作距离。 该机构可以使用主机或主机软件执行工作距离控制功能，或者更优选地，在工作距离被精确调整的过程的持续时间内将该功能委托给专用处理器。 一旦精密调整方案结束，主机就优选地在工作距离方向上恢复驱动装置的控制，然后使用来自位于电动机或驱动装置的积分的位置报告装置的反馈来执行工具的大规模运动。