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公开(公告)号：US20240326082A1
公开(公告)日：2024-10-03
申请号：US18743521
申请日：2024-06-14
Applicant: CATALER CORPORATION
Inventor： Keisuke Sakakibara , Yoshio Nakamura , Katsuyoshi Sudo , Kazuki Ichikawa
CPC classification number: B05C5/02 , B01J35/57 , B01J37/0215 , B05C11/1002 , B05C13/00
Abstract: An exhaust gas-purifying catalyst-manufacturing apparatus includes a holder holding a honeycomb substrate in an upright state; a guide member including a cylindrical portion inserted into an upper opening of a cylindrical body to be spaced apart from the honeycomb structure and the cylindrical body, having a first flow path allowing a supply of a coating liquid through the cylindrical portion to an upper surface of the honeycomb structure, and forming a second flow path allowing a supply of gas via a gap between the cylindrical portion and the cylindrical body to the upper surface of the honeycomb structure; a supplier supplying the coating liquid to the guide member; and a suction device sucking gas from a lower end of the cylindrical body.
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公开(公告)号：US20240322713A1
公开(公告)日：2024-09-26
申请号：US18396845
申请日：2023-12-27
Applicant: Samsung Display Co., LTD.
Inventor： MINCHUL SONG , MINGOO KANG , JUNHYEUK KO , Eui Gyu KIM , Sukha RYU , SANGHEON JEON
CPC classification number: H02N13/00 , B05C13/00 , B05C21/005
Abstract: A thin film deposition apparatus according to an embodiment includes a chamber, a deposition source disposed in a chamber and that supplies a deposition material to the substrate, a mask assembly comprising pattern holes through which the deposition material passes, and an electrostatic chuck facing the mask assembly and that fixes the substrate. The electrostatic chuck comprises a body that supports the substrate, an insulating layer disposed on the body, a first electrode disposed in the insulating layer and spaced apart from the body by a first distance, a second electrode disposed in the insulating layer and spaced apart from the body by a second distance, and a conductive layer disposed in the insulating layer and spaced apart from the body by a third distance. The first electrode and the second electrode are supplied with different voltages, and the third distance is greater than the first distance.
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公开(公告)号：US12084756B2
公开(公告)日：2024-09-10
申请号：US17400508
申请日：2021-08-12
Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
Inventor： Buxiang Chen
CPC classification number: C23C14/505 , B05C13/00 , H01L21/6715
Abstract: Provided are a carrier component and a coating developer device. The carrier component includes a supporting pillar, a first carrier stage and a second carrier stage that is provided with an accommodating cavity and a through mounting hole in communication with the accommodating cavity and includes at least two casings which are assembled to form the through mounting hole matched with the supporting pillar and the accommodating cavity surrounding the first carrier stage; and the at least two casings are detachably connected to one another.
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公开(公告)号：US12076745B2
公开(公告)日：2024-09-03
申请号：US17870111
申请日：2022-07-21
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Shiori Hirose , Masahiro Tokoh , Kenichi Ooshiro
Abstract: According to an embodiment, a winding apparatus includes a winding core and an air flow controller. The winding core winds a belt-shaped structure comprising a substrate and an edge-coating part that covers an edge of a substrate in a width direction, the edge-coating part being coated with a material liquid on a surface of the substrate. The air flow controller has a nozzle that performs at least either ejection or suction of a gas, and adjusts an air flow in the vicinity of the edge-coating part of the film of the belt-shaped structure, which is wound by a winding core.
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公开(公告)号：US11985887B2
公开(公告)日：2024-05-14
申请号：US17647410
申请日：2022-01-07
Applicant: KATEEVA, INC.
Inventor： Digby Pun , Cormac McKinley Wicklow
Abstract: A system may include a support surface for supporting a substrate, a plurality of first passages arranged to distribute flows of a first gas to establish a gas bearing to float the substrate above the support surface, and a plurality of second passages arranged to distribute flows of a second gas to convey the substrate along the support surface. A method may include floating a substrate above a support surface of a substrate support apparatus via a gas bearing; and while floating the substrate, conveying the substrate along the support surface by flowing gas toward a surface of the substrate and in a nonperpendicular direction relative to the surface of the substrate.
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Patent Agency Ranking
公开(公告)号：US20240075492A1
公开(公告)日：2024-03-07
申请号：US18506799
申请日：2023-11-10
Applicant: Applied Materials, Inc.
Inventor： Kangkang WANG , Yaseer Arafath AHAMED , Yige GAO , Benjamin B. RIORDON , Rami HOURANI , James D. STRASSNER , Ludovic GODET , Thinh NGUYEN
Abstract: An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.
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公开(公告)号：US20240024906A1
公开(公告)日：2024-01-25
申请号：US18255333
申请日：2021-12-03
Applicant: Dürr Systems AG
Inventor： Christoph HAIST , Corinna MAIER , Dietmar WIELAND , Sören WEHLER
CPC classification number: B05B13/0221 , B05B13/0452 , B05C13/00
Abstract: In order to provide a workpiece treatment plant that has a simple design and can be used flexibly, the treatment plant comprises multiple treatment zones, each of which includes one or more treatment stations for carrying out one or more treatment steps each, and one or more temporary storage units for temporarily storing the workpieces between two treatment steps.
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公开(公告)号：US11818846B2
公开(公告)日：2023-11-14
申请号：US17575680
申请日：2022-01-14
Applicant: Illinois Tool Works Inc.
Inventor： Thomas C. Prentice , Fernando J. Aguiar , Scott A. Reid
CPC classification number: H05K13/0469 , B05B3/02 , B05C5/0225 , B05C13/00 , H05K3/1241 , H01L21/6715 , H05K2203/0126
Abstract: A dispensing system includes a dispensing unit assembly configured to dispense viscous material and a gantry coupled to the frame. The gantry is configured to support the dispensing unit assembly and to move the dispensing unit assembly in x-axis and y-axis directions. The dispensing unit assembly includes a support bracket secured to the gantry and a movable bracket rotatably coupled to the support bracket by a first strain wave gear system configured to enable the rotation of the movable bracket with respect to the support bracket about a first axis. The dispensing unit assembly further includes a dispensing unit rotatably coupled to the movable bracket by a second strain wave gear system configured to enable the rotation of the dispensing unit with respect to the movable bracket about a second axis generally perpendicular to the first axis.
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9.发明公开公开(公告)号：US20230302487A1
公开(公告)日：2023-09-28
申请号：US18020845
申请日：2021-07-14
Applicant: ALD Vacuum Technologies GmbH
Inventor： Jörg Wittich , Simon Oberle , Jürgen Hotz , Stefan Kunkel , Wolfgang Rieth
CPC classification number: B05C13/00 , B25J11/0075
Abstract: The disclosure relates to a method for changing a workpiece carrier device in a production plant for coating substrates. The method comprises the steps of:
displacing a workpiece carrier device by means of a robot from a supply zone to a processing zone;
releasably coupling the workpiece carrier device to the production plant via a coupling interface of the workpiece carrier device by further displacing the workpiece carrier device by means of the robot,
wherein for releasably coupling the workpiece carrier device to the production plant, a connecting arm of the workpiece carrier device is coupled to a connection section of the production plant, thereby fixing the connecting arm in a fixed position relative to the connection section, and
wherein for releasably coupling the workpiece carrier device to the production plant, a drive shaft of the workpiece carrier device is coupled to a driving shaft of the production plant, thereby connecting the drive shaft to the driving shaft in a rotatably drivable manner.-
公开(公告)号：US11752518B2
公开(公告)日：2023-09-12
申请号：US17338348
申请日：2021-06-03
Applicant: SST Systems, Inc.
Inventor： Robert G. Rock , Chad Martin Andreae
IPC: B05C3/10 , B05D1/18 , B05D3/00 , B05D3/02 , B05C13/00 , B25J11/00 , B05C3/08 , B25J17/02 , B05C9/14 , B25J15/02
CPC classification number: B05D1/18 , B05C3/08 , B05C3/10 , B05C9/14 , B05C13/00 , B05D3/002 , B05D3/0272 , B25J11/0075 , B25J15/0213 , B25J17/0283
Abstract: A coating system includes a plurality of liquid immersion workstations positioned along an arcuate path, the plurality of liquid immersion workstations defining a single complete coating process for a sequence of objects. A plurality of curing workstations are configured to independently receive objects of the sequence of objects exiting the plurality of liquid immersion workstations. An articulated robotic arm has a base positioned inside the arcuate path in top plan view such that the robotic arm is operable to carry each object of the sequence of objects through each of the plurality of liquid immersion workstations and to exactly one of the plurality of curing workstations. An articulated robotic hand is provided at a distal end of the robotic arm and configured to grasp and hold each of the objects and to oscillate the object while submerged in each of the plurality of liquid immersion workstations.
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