公开(公告)号：US20140240720A1

公开(公告)日：2014-08-28

申请号：US14347022

申请日：2012-09-13

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Yi Qiao ,  Michael W. Dolezal ,  David L. Hofeldt ,  Jack W. Lai ,  Catherine P. Tarnowski

IPC: G01B11/04

CPC classification number: G01B11/04 ,  G01B11/046 ,  G01N21/8901

Abstract: A method includes passing an interrogating light beam through a Fourier transform lens and onto the surface of a material to form a Fraunhofer diffraction pattern of one or more surface features of the material. An image of the diffraction pattern is processed to determine the dimensions of the feature.

Abstract translation: 一种方法包括将询问光束通过傅里叶变换透镜并传递到材料的表面上以形成材料的一个或多个表面特征的弗劳恩霍夫衍射图案。 处理衍射图案的图像以确定特征的尺寸。

公开(公告)号：US20150009301A1

公开(公告)日：2015-01-08

申请号：US14375002

申请日：2013-01-30

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Evan J. Ribnick ,  Yi Qiao ,  Jack W. Lai ,  David L. Hofeldt

IPC: G06T17/10 ,  H04N13/02 ,  G01B11/24

CPC classification number: G06T17/10 ,  G01B11/002 ,  G01B11/24 ,  G01B11/303 ,  G06T7/571 ,  G06T2200/04 ,  G06T2200/08 ,  G06T2207/10016 ,  G06T2207/10028 ,  G06T2207/30124 ,  G06T2207/30136 ,  G06T2219/2004 ,  H04N13/221

Abstract: A method includes imaging a surface with at least one imaging sensor, wherein the surface and the imaging sensor are in relative translational motion. The imaging sensor includes a lens having a focal plane aligned at a non-zero angle with respect to an x-y plane of a surface coordinate system. A sequence of images of the surface is registered and stacked along a z direction of a camera coordinate system to form a volume. A sharpness of focus value is determined for each (x,y) location in the volume, wherein the (x,y) locations lie in a plane normal to the z direction of the camera coordinate system. Using the sharpness of focus values, a depth of maximum focus zm along the z direction in the camera coordinate system is determined for each (x,y) location in the volume, and based on the depths of maximum focus zm, a three dimensional location of each point on the surface may be determined.

Abstract translation: 一种方法包括用至少一个成像传感器对表面进行成像，其中表面和成像传感器处于相对平移运动。 成像传感器包括具有相对于表面坐标系的x-y平面非零角度对准的焦平面的透镜。 沿相机坐标系的z方向记录并堆叠表面的一系列图像以形成体积。 对于体积中的每个（x，y）位置确定焦点值的清晰度，其中（x，y）位置位于与摄像机坐标系的z方向垂直的平面中。 使用焦点值的清晰度，针对体积中的每个（x，y）位置确定摄像机坐标系中沿Z方向的最大焦点zm的深度，并且基于最大焦点zm的深度，三维位置 可以确定表面上的每个点。

公开(公告)号：US20140362371A1

公开(公告)日：2014-12-11

申请号：US14366399

申请日：2012-12-11

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Yi Qiao ,  Jack W. Lai ,  Evan J. Ribnick ,  David L. Hofeldt

IPC: G01B11/30 ,  G01N21/95

CPC classification number: G01B11/303 ,  G01B11/30 ,  G01N21/8806 ,  G01N21/8901 ,  G01N21/95 ,  G01N2201/06113 ,  G01N2201/12

Abstract: A method includes forming a two-dimensional interrogating beam on a selected sample region of a surface; collecting light transmitted through or reflected from the sample region with an array of lenses to form a sample array of focus spots; imaging the sample array of focus spots through an imaging lens on a sensor; and comparing an image of the sample array of focus spots to a reference array of focus spots to determine a level of non-uniformity in the sample region.

Abstract translation: 一种方法包括在表面的选定样本区域上形成二维询问光束; 收集通过透镜阵列透射或从样品区域反射的光，以形成焦点的样品阵列; 通过传感器上的成像透镜成像聚焦点的样本阵列; 以及将聚焦点的样本阵列的图像与焦点的参考阵列进行比较，以确定样本区域中的不均匀度。