LINEWIDTH MEASUREMENT SYSTEM
    4.
    发明申请
    LINEWIDTH MEASUREMENT SYSTEM 审中-公开
    LINEWIDTH测量系统

    公开(公告)号:US20140240720A1

    公开(公告)日:2014-08-28

    申请号:US14347022

    申请日:2012-09-13

    CPC classification number: G01B11/04 G01B11/046 G01N21/8901

    Abstract: A method includes passing an interrogating light beam through a Fourier transform lens and onto the surface of a material to form a Fraunhofer diffraction pattern of one or more surface features of the material. An image of the diffraction pattern is processed to determine the dimensions of the feature.

    Abstract translation: 一种方法包括将询问光束通过傅里叶变换透镜并传递到材料的表面上以形成材料的一个或多个表面特征的弗劳恩霍夫衍射图案。 处理衍射图案的图像以确定特征的尺寸。

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