High frequency deflection measurement of IR absorption
    1.
    发明申请
    High frequency deflection measurement of IR absorption 有权
    红外吸收的高频偏转测量

    公开(公告)号:US20080283755A1

    公开(公告)日:2008-11-20

    申请号:US11803421

    申请日:2007-05-15

    IPC分类号: G01N21/84 G01N25/16 G01N13/16

    摘要: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.

    摘要翻译: 已经证明了基于AFM的技术用于在样品表面上进行高度局部化的IR光谱。 在商业可行的分析仪器中实施的这种技术将是非常有用的。 必须改变实验设置的各个方面,以创建商业版本。 本发明解决了许多这些问题,从而产生了一般可用于科学界的驾驶室的分析技术的版本。

    Probe with embedded heater for nanoscale analysis
    3.
    发明申请
    Probe with embedded heater for nanoscale analysis 有权
    探头采用嵌入式加热器进行纳米级分析

    公开(公告)号:US20060254345A1

    公开(公告)日:2006-11-16

    申请号:US11405772

    申请日:2006-04-18

    IPC分类号: G01B5/28

    CPC分类号: G01Q60/58 G01Q70/10 G01Q70/14

    摘要: The invention is a heated thermal probe suitable for use in micro- thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever with a sharp probe tip of a type used in Scanning Probe Microscopes (SPM's) which further includes an integral resistive heating element. The heating element is formed by doping regions of the cantilever with an ion implant process to make lower resistance connections and a higher resistance heating element. There is no spatial overlap between the base of the probe tip and the heating element or conductors.

    摘要翻译: 本发明是适用于微热分析或其他高分辨率热测量和动作的加热热探针。 在优选实施例中,探针是具有在扫描探针显微镜(SPM)中使用的类型的尖锐探针尖端的微制造悬臂,其还包括积分电阻加热元件。 加热元件通过用离子注入工艺掺杂悬臂的区域形成,以形成较低的电阻连接和较高电阻的加热元件。 探针尖端的基部和加热元件或导体之间没有空间重叠。

    Probe with embedded heater for nanoscale analysis
    4.
    发明授权
    Probe with embedded heater for nanoscale analysis 有权
    探头采用嵌入式加热器进行纳米级分析

    公开(公告)号:US07497613B2

    公开(公告)日:2009-03-03

    申请号:US11405772

    申请日:2006-04-18

    CPC分类号: G01Q60/58 G01Q70/10 G01Q70/14

    摘要: The invention is a heated thermal probe suitable for use in micro-thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever with a sharp probe tip of a type used in Scanning Probe Microscopes (SPM's) which further includes an integral resistive heating element. The heating element is formed by doping regions of the cantilever with an ion implant process to make lower resistance connections and a higher resistance heating element. There is no spatial overlap between the base of the probe tip and the heating element or conductors.

    摘要翻译: 本发明是适用于微热分析或其他高分辨率热测量和动作的加热热探针。 在优选实施例中,探针是具有在扫描探针显微镜(SPM)中使用的类型的尖锐探针尖端的微制造悬臂,其还包括积分电阻加热元件。 加热元件通过用离子注入工艺掺杂悬臂的区域形成,以形成较低的电阻连接和较高电阻的加热元件。 探针尖端的基部和加热元件或导体之间没有空间重叠。