公开(公告)号：US09535112B2

公开(公告)日：2017-01-03

申请号：US14472398

申请日：2014-08-29

Applicant: ADVANTEST CORPORATION

Inventor： Hirotaka Sasaki ,  Tsuyoshi Yamashita ,  Noboru Masuda

IPC: G01R31/10 ,  G01R31/28

CPC classification number: G01R31/2875 ,  G01R31/28 ,  G01R31/2851

Abstract: Increase in number of valves complicates the configuration and control. A temperature control apparatus for controlling a temperature of a device, includes; a heat exchange section exchanging heat with the device; a main flow path causing a fluid to flow; a sub flow path causing, to flow, a fluid having a temperature different from a temperature of the fluid flowing through the main flow path; a mixture flow path merging the fluids from the main flow path and the sub flow path and causing the merged fluids to flow to the heat exchange section; and a flow rate adjusting section adjusting an amount of a fluid flowing from the sub flow path to the mixture flow path, in relation to the fluid flowing through the main flow path.

Abstract translation: 阀门数量的增加使配置和控制复杂化。 一种用于控制装置的温度的温度控制装置，包括： 与所述装置进行热交换的热交换部; 使流体流动的主流路; 使流体流过与流过主流路的流体的温度不同的流体的副流路; 混合流路，其将来自主流路和副流路的流体汇合并使合并流体流向热交换部; 以及流量调节部，其相对于流过主流路的流体，调整从副流路流向混合流路的流体量。