Diffractive optical element, projection device and measuring device

    公开(公告)号:US11598972B2

    公开(公告)日:2023-03-07

    申请号:US16672669

    申请日:2019-11-04

    Applicant: AGC Inc.

    Abstract: To provide a diffractive optical element having a high light utilization efficiency, whereby light spots having a predetermined pattern can be stably formed, a projection device and a measuring device.
    The diffractive optical element of the present invention comprises a transparent substrate, a convexo-concave portion formed so as to be in contact with one surface of the transparent substrate and a filling portion with which concave portions of the convexo-concave portions are filled and which covers top surfaces of convex portions of the convexo-concave portion for planarizing the convexo-concave portion, wherein the convexo-concave portion has at least two stages on the surface of the transparent substrate; the top surfaces of the respective stages are parallel to one another; among the transparent substrate, the convexo-concave portion and the filling portion, the refractive indexes of at least the convexo-concave portion and the filling portion are different with respect to the incident light which enters from the normal direction of the surface of the transparent substrate; and the refractive indexes of the transparent substrate, the convexo-concave portion and the filling portion with respect to incident light are at most 2.2.

    Optical element, optical system, and imaging apparatus

    公开(公告)号:US11489990B2

    公开(公告)日:2022-11-01

    申请号:US17026367

    申请日:2020-09-21

    Applicant: AGC Inc.

    Abstract: The present invention relates to an optical element including an optical surface, a tapered part located on an outer peripheral side of the optical surface and having a normal line of which a direction heading to an outside of the optical element from an inside thereof, faces an optical axis side, and a side surface part located on an outer peripheral side of the tapered part, in which when a distance in a straight line vertical to an optical axis of from an end point on the optical axis side of the tapered part to the side surface part is denoted by A and a height of the tapered part based on the straight line is defined by B, in a cross section including the optical axis and passing through the tapered part, B/A is larger than 0.2.

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