Diffractive optical element and illumination optical system

    公开(公告)号:US12085739B2

    公开(公告)日:2024-09-10

    申请号:US17227520

    申请日:2021-04-12

    Applicant: AGC Inc.

    CPC classification number: G02B5/1814 G01S7/481 G01S17/931 G02B27/44

    Abstract: A diffractive optical element includes: a diffraction unit; and a lens unit disposed on a light incident side of the diffraction unit. The lens unit includes: a substrate; and a protrusion and recess portion disposed on a side opposite to a light incident side of the substrate. The protrusion and recess portion includes: a periodic structure of a relief-protrusion portion disposed in a central part, a periodic structure of a stepwise grating disposed in a central part simulating the relief-protrusion portion, or a combination thereof; and a grating disposed in a portion other than the central part. The number of steps of the stepwise grating disposed in the central part is larger than the number of steps of the grating disposed in the portion other than the central part.

    Diffractive optical element, projection device, and measurement device

    公开(公告)号:US11536981B2

    公开(公告)日:2022-12-27

    申请号:US17114985

    申请日:2020-12-08

    Applicant: AGC INC.

    Abstract: A diffractive optical element includes: a substrate; a protrusion and recess portion that is formed on one surface of the substrate and imposes predetermined diffraction on incident light; and an antireflection layer provided between the substrate and the protrusion and recess portion. An effective refractive index difference Δn in a wavelength range of the incident light between a first medium constituting a protrusion of the protrusion and recess portion and a second medium constituting a recess of the protrusion and recess portion is 0.70 or more. An exit angle range θout of diffraction light exiting from the protrusion and recess portion when the incident light enters the substrate from a normal direction of the substrate is 60° or more. Total efficiency of diffraction light exiting from the protrusion and recess portion in the exit angle range is 65% or more.

    Diffractive optical element, projection device, and measurement device'

    公开(公告)号:US12147058B2

    公开(公告)日:2024-11-19

    申请号:US18051738

    申请日:2022-11-01

    Applicant: AGC INC.

    Abstract: A diffractive optical element includes: a substrate; a protrusion and recess portion that is formed on one surface of the substrate and imposes predetermined diffraction on incident light; and an antireflection layer provided between the substrate and the protrusion and recess portion. An effective refractive index difference Δn in a wavelength range of the incident light between a first medium constituting a protrusion of the protrusion and recess portion and a second medium constituting a recess of the protrusion and recess portion is 0.70 or more. An exit angle range θout of diffraction light exiting from the protrusion and recess portion when the incident light enters the substrate from a normal direction of the substrate is 60° or more. Total efficiency of diffraction light exiting from the protrusion and recess portion in the exit angle range is 65% or more.

    Diffractive optical element, projection device and measuring device

    公开(公告)号:US11598972B2

    公开(公告)日:2023-03-07

    申请号:US16672669

    申请日:2019-11-04

    Applicant: AGC Inc.

    Abstract: To provide a diffractive optical element having a high light utilization efficiency, whereby light spots having a predetermined pattern can be stably formed, a projection device and a measuring device.
    The diffractive optical element of the present invention comprises a transparent substrate, a convexo-concave portion formed so as to be in contact with one surface of the transparent substrate and a filling portion with which concave portions of the convexo-concave portions are filled and which covers top surfaces of convex portions of the convexo-concave portion for planarizing the convexo-concave portion, wherein the convexo-concave portion has at least two stages on the surface of the transparent substrate; the top surfaces of the respective stages are parallel to one another; among the transparent substrate, the convexo-concave portion and the filling portion, the refractive indexes of at least the convexo-concave portion and the filling portion are different with respect to the incident light which enters from the normal direction of the surface of the transparent substrate; and the refractive indexes of the transparent substrate, the convexo-concave portion and the filling portion with respect to incident light are at most 2.2.

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