公开(公告)号：US12040212B2

公开(公告)日：2024-07-16

申请号：US18339476

申请日：2023-06-22

Applicant: AGC Inc.

Inventor： Yuha Kobayashi ,  Kenji Goto

IPC: B32B3/00 ,  C03B5/18 ,  C03C3/078 ,  C03C3/083 ,  C03C3/085 ,  C03C3/087 ,  C03C3/089 ,  C03C3/091 ,  C03C3/093 ,  C03C3/095 ,  H01L21/683

CPC classification number: H01L21/6835 ,  C03B5/18 ,  C03C3/078 ,  C03C3/083 ,  C03C3/085 ,  C03C3/087 ,  C03C3/089 ,  C03C3/091 ,  C03C3/093 ,  C03C3/095

Abstract: To appropriately manufacture a semiconductor device. A glass substrate is a glass substrate for manufacturing the semiconductor device. In a case in which one surface is directed downward in a vertical direction, and a first position, a second position, and a third position on the one surface on an outer side in a radial direction with respect to a center point of the glass substrate are supported by supporting members, a lowest point as a position where a height in the vertical direction is the lowest on other surface is positioned in a circular central region on an inner side in the radial direction with respect to the first position, the second position, and the third position when viewed from the vertical direction, a center of the central region is a center point of the glass substrate, and a diameter of the central region has a length of ⅓ of a diameter of the glass substrate.

公开(公告)号：US12068181B2

公开(公告)日：2024-08-20

申请号：US18479872

申请日：2023-10-03

Applicant: AGC Inc.

Inventor： Yuha Kobayashi ,  Yuichi Yoshida ,  Keisuke Hanashima

IPC: B32B3/00 ,  C03C15/02 ,  H01L21/304 ,  H01L21/66 ,  H01L21/67 ,  H01L23/15

CPC classification number: H01L21/67288 ,  C03C15/02 ,  H01L21/304 ,  H01L21/67253 ,  H01L22/12 ,  H01L23/15

Abstract: To suppress lowering of dimensional accuracy. A manufacturing method for a glass substrate is a manufacturing method for the glass substrate that supports a semiconductor device, the manufacturing method including: generating a glass base plate; measuring a thickness, a thickness deviation, and a warpage amount of the glass base plate; screening the glass base plate based on the thickness of the glass base plate; generating a plurality of glass blanks by cutting the screened glass base plate; setting a first polishing condition for the glass blank based on the thickness, the thickness deviation, and the warpage amount of the glass base plate; generating a glass plate by polishing a surface of the glass blank based on the first polishing condition; measuring a thickness, a thickness deviation, and a warpage amount of the glass plate; screening the glass plate based on the thickness of the glass plate; setting a second polishing condition for the glass plate based on the thickness, the thickness deviation, and the warpage amount of the glass plate; and polishing a surface of the screened glass plate based on the second polishing condition to generate a rectangular glass substrate in which a length of a side is equal to or larger than 300 mm and a thickness is equal to or larger than 0.5 mm.

公开(公告)号：US11802080B2

公开(公告)日：2023-10-31

申请号：US17813372

申请日：2022-07-19

Applicant: AGC Inc.

Inventor： Yuha Kobayashi ,  Shigeto Kumano ,  Kaede Katsuno ,  Keisuke Hanashima ,  Kohei Horiuchi

IPC: B32B3/00 ,  C03C23/00

CPC classification number: C03C23/0025

Abstract: A glass substrate 10 has a mark provided on a surface 10A of the glass substrate 10, the mark including plural dots 104, a depth H of each of the dots 104 is 0.5 μm or larger and 7.0 μm or smaller, and an inclination angle of a side surface 104B of each of the dots 104 is 5° or larger and 56° or smaller.

公开(公告)号：US11021389B2

公开(公告)日：2021-06-01

申请号：US16941631

申请日：2020-07-29

Applicant: AGC Inc.

Inventor： Seiji Inaba ,  Yasunari Saito ,  Kiyoshi Tamai ,  Kazutaka Ono ,  Yuha Kobayashi

IPC: B32B17/00 ,  C03C3/087 ,  C03C3/085 ,  H01L23/15 ,  C03C3/095 ,  C03C3/091 ,  C03C3/097

Abstract: A supporting glass substrate has a ratio of a Young's modulus (GPa) to a density (g/cm3) that is 37.0 (GPa·cm3/g) or more and the ratio has a value larger than a ratio calculation value, the ratio calculation value being a ratio of a Young's modulus (GPa) calculated from a composition to a density (g/cm3). The ratio calculation value is represented by the following expression: α=2·Σ{(Vi·Gi)/Mi·Xi}, where, in the expression, Vi is a filling parameter of a metal oxide contained in the supporting glass substrate, Gi is a dissociation energy of a metal oxide contained in the supporting glass substrate, Mi is a molecular weight of a metal oxide contained in the supporting glass substrate, and Xi is a molar ratio of a metal oxide contained in the supporting glass substrate.