公开(公告)号：US20240023446A1

公开(公告)日：2024-01-18

申请号：US18258347

申请日：2021-02-03

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Yao ZHU ,  Chen LIU ,  Nan WANG

IPC: H10N30/067 ,  H10N30/87 ,  H03H9/17 ,  H10N30/07 ,  H03H3/02

CPC classification number: H10N30/067 ,  H10N30/871 ,  H03H9/171 ,  H10N30/07 ,  H03H3/02 ,  H03H2009/02299

Abstract: Various embodiments may relate to an acoustic resonator. The acoustic resonator may include a piezoelectric layer. The acoustic resonator may also include a first electrode in contact with a first surface of the piezoelectric layer. The acoustic resonator may further include a plurality of dielectric structures in contact with the first surface of the piezoelectric layer. The acoustic resonator may additionally include a second electrode in contact with a second surface of the piezoelectric layer opposite the first surface. The first electrode may include a plurality of electrode structures. A dielectric structure of the plurality of dielectric structures may be in contact with a pair of neighboring electrode structures of the plurality of electrode structures.