公开(公告)号：US20240137001A1

公开(公告)日：2024-04-25

申请号：US18548275

申请日：2021-03-21

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Sagnik GHOSH ,  Eldwin Jiaqiang NG ,  Jaibir SHARMA ,  Srinivas MERUGU

IPC: H03H9/13 ,  H03H3/02 ,  H03H9/17

CPC classification number: H03H9/13 ,  H03H3/02 ,  H03H9/17

Abstract: Various embodiments may relate to a resonator. The resonator may include a support including a substrate portion, and a membrane portion extending from the substrate portion over a cavity. The resonator may also include a piezoelectric layer on the membrane portion. The resonator may further include an electrode on the piezoelectric layer. The substrate portion may include dopants of a first conductivity type. The membrane portion may include dopants of a second conductivity type different from the first conductivity type. A ratio of a thickness of the membrane portion to a combined thickness of the electrode and the piezoelectric layer may be above 3:1 for temperature compensation.

公开(公告)号：US20240235522A9

公开(公告)日：2024-07-11

申请号：US18548275

申请日：2021-03-22

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Sagnik GHOSH ,  Eldwin Jiaqiang NG ,  Jaibir SHARMA ,  Srinivas MERUGU

IPC: H03H9/13 ,  H03H3/02 ,  H03H9/17

CPC classification number: H03H9/13 ,  H03H3/02 ,  H03H9/17

Abstract: Various embodiments may relate to a resonator. The resonator may include a support including a substrate portion, and a membrane portion extending from the substrate portion over a cavity. The resonator may also include a piezoelectric layer on the membrane portion. The resonator may further include an electrode on the piezoelectric layer. The substrate portion may include dopants of a first conductivity type. The membrane portion may include dopants of a second conductivity type different from the first conductivity type. A ratio of a thickness of the membrane portion to a combined thickness of the electrode and the piezoelectric layer may be above 3:1 for temperature compensation.