公开(公告)号：US20240235522A9

公开(公告)日：2024-07-11

申请号：US18548275

申请日：2021-03-22

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Sagnik GHOSH ,  Eldwin Jiaqiang NG ,  Jaibir SHARMA ,  Srinivas MERUGU

IPC: H03H9/13 ,  H03H3/02 ,  H03H9/17

CPC classification number: H03H9/13 ,  H03H3/02 ,  H03H9/17

Abstract: Various embodiments may relate to a resonator. The resonator may include a support including a substrate portion, and a membrane portion extending from the substrate portion over a cavity. The resonator may also include a piezoelectric layer on the membrane portion. The resonator may further include an electrode on the piezoelectric layer. The substrate portion may include dopants of a first conductivity type. The membrane portion may include dopants of a second conductivity type different from the first conductivity type. A ratio of a thickness of the membrane portion to a combined thickness of the electrode and the piezoelectric layer may be above 3:1 for temperature compensation.

公开(公告)号：US20240137001A1

公开(公告)日：2024-04-25

申请号：US18548275

申请日：2021-03-21

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Sagnik GHOSH ,  Eldwin Jiaqiang NG ,  Jaibir SHARMA ,  Srinivas MERUGU

IPC: H03H9/13 ,  H03H3/02 ,  H03H9/17

CPC classification number: H03H9/13 ,  H03H3/02 ,  H03H9/17

Abstract: Various embodiments may relate to a resonator. The resonator may include a support including a substrate portion, and a membrane portion extending from the substrate portion over a cavity. The resonator may also include a piezoelectric layer on the membrane portion. The resonator may further include an electrode on the piezoelectric layer. The substrate portion may include dopants of a first conductivity type. The membrane portion may include dopants of a second conductivity type different from the first conductivity type. A ratio of a thickness of the membrane portion to a combined thickness of the electrode and the piezoelectric layer may be above 3:1 for temperature compensation.

公开(公告)号：US20240032429A1

公开(公告)日：2024-01-25

申请号：US18044493

申请日：2021-09-23

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Eldwin Jiaqiang NG ,  Nan WANG ,  Srinivas MERUGU ,  Jaibir SHARMA

IPC: H10N30/20 ,  H10N30/853 ,  H10N30/076

CPC classification number: H10N30/2047 ,  H10N30/853 ,  H10N30/076

Abstract: Various embodiments may relate to a piezoelectric device. The piezoelectric device may include a substrate, and a layered stacked arrangement anchored to the substrate. The layered stacked arrangement may include a piezoelectric layer. The stacked arrangement may also include a first electrode on a first side of the piezoelectric layer. The stacked arrangement may further include a second electrode on a second side of the piezoelectric layer opposite the first side. The piezoelectric layer may include a first region including one or more dipole domains of a first type, and one or more dipole domains of a second type. The first electrode may be at least partially in contact with the first region and at least partially in contact with the second region.