公开(公告)号：US11229927B2

公开(公告)日：2022-01-25

申请号：US15770181

申请日：2016-10-13

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Xing Haw Marvin Tan ,  Yuandong Alex Gu ,  Liang Lou

IPC: B06B1/06 ,  B32B43/00 ,  H01L41/09 ,  H04R17/00

Abstract: Embodiments provide an ultrasound transducer. The ultrasound transducer may include a multi-layered membrane having a plurality of slits extending through the membrane, thereby forming a plurality of sections of the membrane at least partially separated by the slits. Each slit extends from a perimeter of the membrane to a respective end position at a predetermined distance away from a center of the membrane. The plurality of sections of the membrane are connected to each other at the center of the membrane.