公开(公告)号：US10076772B2

公开(公告)日：2018-09-18

申请号：US14553023

申请日：2014-11-25

Applicant: Agency for Science, Technology and Research

Inventor： Jinghui Xu ,  Hongbin Yu ,  Liang Lou ,  Alex Yuandong Gu

IPC: B06B1/06 ,  H01L41/053 ,  H01L41/09 ,  H01L41/113 ,  G10K9/122

CPC classification number: B06B1/0644 ,  B06B1/0651 ,  G10K9/122 ,  H01L41/053 ,  H01L41/0973 ,  H01L41/1138 ,  Y10T29/42

Abstract: A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided.

公开(公告)号：US11229927B2

公开(公告)日：2022-01-25

申请号：US15770181

申请日：2016-10-13

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Xing Haw Marvin Tan ,  Yuandong Alex Gu ,  Liang Lou

IPC: B06B1/06 ,  B32B43/00 ,  H01L41/09 ,  H04R17/00

Abstract: Embodiments provide an ultrasound transducer. The ultrasound transducer may include a multi-layered membrane having a plurality of slits extending through the membrane, thereby forming a plurality of sections of the membrane at least partially separated by the slits. Each slit extends from a perimeter of the membrane to a respective end position at a predetermined distance away from a center of the membrane. The plurality of sections of the membrane are connected to each other at the center of the membrane.