公开(公告)号：US10822701B2

公开(公告)日：2020-11-03

申请号：US15528476

申请日：2015-11-18

Applicant: AIXTRON SE

Inventor： Walter Franken ,  Bernhard Zintzen ,  Henricus Wilhelmus Aloysius Janssen

IPC: C23C16/54 ,  B01J3/02 ,  B01J3/03 ,  C23C14/12 ,  C23C14/56 ,  C23C16/455 ,  C23C14/54 ,  C23C16/52

Abstract: A CVD or PVD coating device comprises a housing and a gas inlet organ secured to the housing via a retaining device, the gas inlet organ having a gas outlet surface with gas outlet openings. The retaining device is only secured at its horizontal edge to the housing so as to stabilize the retaining device with respect to deformations and temperature. The gas inlet organ is secured, at a plurality of suspension points, to the retaining device by means of a plurality of hanging elements distributed over the entire horizontal surface of the retaining device. The retaining device has mechanical stabilization elements formed by a retaining frame having vertical walls that are interconnected at vertical connection lines. An actively cooled heat shield is situated between the retaining device and the gas inlet organ.

公开(公告)号：US09847241B2

公开(公告)日：2017-12-19

申请号：US14785308

申请日：2014-04-16

Applicant: AIXTRON SE

Inventor： Martin Freundt ,  Walter Franken

IPC: H01L21/677 ,  F16K3/02 ,  H01L21/67 ,  B25J11/00 ,  F16J15/02

CPC classification number: H01L21/67778 ,  B25J11/0095 ,  F16J15/02 ,  F16K3/0227 ,  H01L21/67126 ,  H01L21/67775

Abstract: A transport module for loading and unloading a process module of a semiconductor production device includes a housing, which has a chamber that can be evacuated. The chamber has an opening that can be closed in a gas-tight manner by a closure device, which opens out into a first coupling duct associated with the transport module. The first coupling duct is connected with a flange plate using an elastic intermediate element, wherein the flange plate can be seated in a plane parallel, sealing manner on a flange plate of a second coupling duct associated with the process module. After opening the closure device, an evacuated loading and unloading duct to the process module is created. An inner and outer mounting section of the intermediate element is spaced apart from one another in the radial direction, with respect to the axis of the first coupling duct, by a deformation zone.