公开(公告)号：US20240071726A1

公开(公告)日：2024-02-29

申请号：US18238426

申请日：2023-08-25

Applicant: ANHUI UNIVERSITY OF TECHNOLOGY

Inventor： Yang YANG ,  Shihong ZHANG ,  Jun ZHENG ,  Jie LI ,  Jinming XIE

IPC: H01J37/32 ,  C23C16/02 ,  C23C16/26 ,  C23C16/50

CPC classification number: H01J37/32449 ,  C23C16/0227 ,  C23C16/0254 ,  C23C16/26 ,  C23C16/50 ,  C23C8/38 ,  H01J2237/332

Abstract: The present disclosure relates to the technical field of composite coating preparation, in particular to a method for plasma-assisted and multi-step continuous preparation of a diffusion layer/amorphous carbon film composite coating and use thereof. In the present disclosure, a high-temperature plasma carburizing/nitriding technology and a low-temperature plasma carbon coating technology are combined by a plasma activation technology with argon ion under gradient cooling, and the surface of a material is activated by multiple bombardment on the surface of the material with high-energy argon ions. In this way, a cluster-like porous and loose structure on a surface of the diffusion layer is removed. In summary, the multi-step continuous preparation of the diffusion layer/amorphous carbon film composite coating is formed based on an integrated technology of the high-temperature plasma diffusion with nitrogen/carbon ion and plasma activation with argon ion under gradient cooling and plasma coating with low-temperature carbon ion.