公开(公告)号：US20250140583A1

公开(公告)日：2025-05-01

申请号：US18820118

申请日：2024-08-29

Applicant: AP SYSTEMS INC.

Inventor： Dae Ryong LEE ,  Sung Chul KIM ,  Sang Hyun JI ,  Chang Kyo KIM

IPC: H01L21/67

Abstract: The present disclosure relates to a heater block and an apparatus for heating a substrate having the same, and more particularly, to a heater block having excellent heat dissipation characteristics and capable of precisely controlling a heating temperature, and an apparatus for heating a substrate having the same. A heater block according to an exemplary embodiment includes a cooling plate provided with a cooling passage through which cooling water flows, a plurality of light emitting modules provided on a first surface of the cooling plate to emit light toward an object to be heated, and a plurality of power supply modules provided on a second surface of the cooling plate and electrically connected to the plurality of light emitting modules by passing through the cooling plate to supply power.