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    Substrate support with switchable multizone heater
    1.
    发明授权
    Substrate support with switchable multizone heater 有权
    基板支持与可切换多区域加热器

    公开(公告)号：US09538583B2

    公开(公告)日：2017-01-03

    申请号：US13742639

    申请日：2013-01-16

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Leon Volfovski ,  Mayur G. Kulkarni ,  Alex Minkovich ,  Michael R. Rice

    IPC: H05B3/68 ,  H05B3/26 ,  H01L21/67 ,  H05B1/02

    CPC classification number: H05B3/26 ,  H01L21/67103 ,  H05B1/0233

    Abstract: Embodiments of substrate supports with a heater are provided herein. In some embodiments, a substrate support may include a first member to distribute heat to a substrate when present above a first planar surface of the first member, a second member disposed beneath the first member, the second member including a plurality of resistive heating elements, wherein the plurality of resistive heating elements provide local temperature compensation to the first member to heat the substrate when present, a third member disposed beneath the second member, the third member including one or more base heating zones to provide a base temperature profile to the first member, and a fourth member disposed beneath the third member, the fourth member including a first set of electrical conductors coupled to each of the resistive heating elements.

    Abstract translation: 本文提供了具有加热器的基板支撑件的实施例。 在一些实施例中，衬底支撑件可以包括第一构件，用于当存在于第一构件的第一平面表面上方时将热量分配到衬底;第二构件，设置在第一构件下方，第二构件包括多个电阻加热元件， 其中所述多个电阻加热元件在存在时向所述第一构件提供局部温度补偿以加热所述基板，设置在所述第二构件下方的第三构件，所述第三构件包括一个或多个基座加热区以向所述第一构件提供基座温度曲线 以及设置在所述第三构件下方的第四构件，所述第四构件包括耦合到每个所述电阻加热元件的第一组电导体。

    Vibration-controlled substrate handling robots, systems, and methods
    2.
    发明授权
    Vibration-controlled substrate handling robots, systems, and methods 有权
    振动控制基板处理机器人，系统和方法

    公开(公告)号：US09296105B2

    公开(公告)日：2016-03-29

    申请号：US14085462

    申请日：2013-11-20

    Applicant: Applied Materials, Inc.

    Inventor： Nir Merry ,  Alex Minkovich ,  Jeffrey C. Hudgens ,  Brendan Till

    IPC: B25J9/00 ,  B25J9/16

    CPC classification number: B25J9/1653

    Abstract: Embodiments disclose a vibration-controlled robot apparatus. The apparatus includes a robot having an end effector operable to transport a substrate, a sensor coupled to the robot, the sensor operable to sense vibration as the robot transports the substrate, and operating the robot to reduce vibration of the end effector supporting the substrate. In some embodiments, a filter is provided in the motor drive circuit to filter one or more frequencies causing unwanted vibration of the end effector. Vibration control systems and methods of operating the same are provided, as are other aspects.

    Abstract translation: 实施例公开了一种振动控制机器人装置。 该装置包括机器人，其具有可操作地输送基底的端部执行器，耦合到机器人的传感器，当机器人传送基板时可操作以感测振动的传感器，以及操作机器人以减少支撑基板的端部执行器的振动。 在一些实施例中，在马达驱动电路中提供过滤器以过滤一个或多个引起末端执行器的不希望的振动的频率。 与其他方面一样，提供了振动控制系统及其操作方法。

    VIBRATION-CONTROLLED SUBSTRATE HANDLING ROBOTS, SYSTEMS, AND METHODS
    7.
    发明申请
    VIBRATION-CONTROLLED SUBSTRATE HANDLING ROBOTS, SYSTEMS, AND METHODS 有权
    振动控制基板处理机器人，系统和方法

    公开(公告)号：US20140156070A1

    公开(公告)日：2014-06-05

    申请号：US14085462

    申请日：2013-11-20

    Applicant: Applied Materials, Inc.

    Inventor： Nir Merry ,  Alex Minkovich ,  Jeffrey C. Hudgens ,  Brendan Till

    IPC: B25J9/16

    CPC classification number: B25J9/1653

    Abstract: Embodiments disclose a vibration-controlled robot apparatus. The apparatus includes a robot having an end effector operable to transport a substrate, a sensor coupled to the robot, the sensor operable to sense vibration as the robot transports the substrate, and operating the robot to reduce vibration of the end effector supporting the substrate. In some embodiments, a filter is provided in the motor drive circuit to filter one or more frequencies causing unwanted vibration of the end effector. Vibration control systems and methods of operating the same are provided, as are other aspects.

    Abstract translation: 实施例公开了一种振动控制机器人装置。 该装置包括机器人，其具有可操作地输送基底的端部执行器，耦合到机器人的传感器，当机器人传送基板时可操作以感测振动的传感器，以及操作机器人以减少支撑基板的端部执行器的振动。 在一些实施例中，在马达驱动电路中提供过滤器以过滤一个或多个引起末端执行器的不希望的振动的频率。 与其他方面一样，提供了振动控制系统及其操作方法。

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