公开(公告)号：US11823937B2

公开(公告)日：2023-11-21

申请号：US16990839

申请日：2020-08-11

申请人： APPLIED MATERIALS, INC.

发明人： Nicholas Michael Bergantz ,  Andreas Schmid ,  Leon Volfovski ,  Sanggyum Kim ,  Damon Cox ,  Paul Wirth

IPC分类号： H01L21/68 ,  B25J11/00 ,  H01L21/687 ,  H01L21/67 ,  B25J9/16

CPC分类号： H01L21/681 ,  B25J9/1692 ,  B25J11/0095 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67259 ,  H01L21/68707

摘要： A calibration object is retrieved, by a first robot arm of a transfer chamber, from a processing chamber connected to the transfer chamber and placed in a load lock connected to the transfer chamber. The calibration object is retrieved from the load lock by a second robot arm of a factory interface connected to the load lock and placed at an aligner station housed in or connected to the factory interface. The calibration object has a first orientation at the aligner station. A difference is determined between the first orientation and an initial target orientation at the aligner station. A first characteristic error value associated with the processing chamber is determined based on the determined difference. The first characteristic error value is recorded in a storage medium. The aligner station is to use the first characteristic error value for alignment of objects to be placed in the processing chamber.

公开(公告)号：US20240021458A1

公开(公告)日：2024-01-18

申请号：US18476223

申请日：2023-09-27

申请人： APPLIED MATERIALS, INC.

发明人： Nicholas Michael Bergantz ,  Andreas Schmid ,  Leon Volfovski ,  Sanggyum Kim ,  Damon Cox ,  Paul Wirth

IPC分类号： H01L21/68 ,  B25J11/00 ,  H01L21/687 ,  H01L21/67 ,  B25J9/16

CPC分类号： H01L21/681 ,  B25J11/0095 ,  H01L21/68707 ,  H01L21/67201 ,  H01L21/67259 ,  H01L21/67196 ,  B25J9/1692

摘要： A calibration object is transferred from a processing chamber to an aligner station by one or more robot arms. The calibration object has a first processing chamber orientation in the processing chamber and a second orientation at the aligner station. A first characteristic error value associated with a transfer path between the processing chamber and the aligner is determined based on the first processing chamber orientation and the second orientation of the calibration object at the aligner station. In response to detecting an object at the aligner station to be transferred to the processing chamber along the transfer path, the object is aligned by the aligner station to be placed in the processing chamber according to a target processing chamber orientation based on a target aligner orientation as adjusted by the first characteristic error value determined for the transfer path between the processing chamber and the aligner station.

公开(公告)号：US20210057256A1

公开(公告)日：2021-02-25

申请号：US16990839

申请日：2020-08-11

申请人： APPLIED MATERIALS, INC.

发明人： Nicholas Michael Bergantz ,  Andreas Schmid ,  Leon Volfovski ,  Sanggyum Kim ,  Damon Cox ,  Paul Wirth

IPC分类号： H01L21/68 ,  G01B11/27 ,  B25J11/00 ,  H01L21/67 ,  H01L21/687

摘要： A method for calibrating an aligner station of an electronics processing system is provided. A calibration is retrieved, by a first robot arm of a transfer chamber, from a processing chamber connected to the transfer chamber. The calibration object has a target orientation in the processing chamber. The calibration is placed, by the first robot art, in a load lock connected to the transfer chamber. The calibration is retrieved from the load lock by a second robot arm of a factory interface connected to the load lock. The calibration object is placed, by the second robot arm, at an aligner station housed in or connected to the factory interface. The calibration object has a first orientation at the aligner station. A difference is determined between the first orientation at the aligner station and an initial target orientation at the aligner station. The initial target orientation at the aligner station is associated with the target orientation in the processing chamber. A first characteristic error value associated with the processing chamber is determined based on the difference between the first orientation and the initial target orientation. The first characteristic error value is recorded in a storage medium. The aligner station is to use the first characteristic error value for alignment of objects to be placed in the processing chamber.