公开(公告)号：US20160169593A1

公开(公告)日：2016-06-16

申请号：US15050419

申请日：2016-02-22

Applicant: APPLIED MATERIALS, INC.

Inventor： KALLOL BERA ,  XIAOPING ZHOU ,  DOUGLAS A. BUCHBERGER, JR. ,  ANDREW NGUYEN ,  HAMID TAVASSOLI ,  SURAJIT KUMAR ,  SHAHID RAUF

IPC: F28F3/12

CPC classification number: F28F3/12 ,  F28F2013/001

Abstract: Apparatus for controlling the thermal uniformity of a substrate are provided. The thermal uniformity of the substrate may be controlled to be more uniform or the thermal uniformity of the substrate may be controlled to be non-uniform in a desired pattern. In some embodiments, an apparatus for controlling the thermal uniformity of a substrate includes: a substrate support having a support surface to support a substrate thereon; and a flow path disposed within the substrate support to flow a heat transfer fluid beneath the support surface, wherein the flow path comprises a first portion and a second portion, each portion having a substantially equivalent axial length, wherein the first portion is spaced about 2 mm to about 10 mm from the second portion, and wherein the first portion provides a flow of heat transfer fluid in a direction opposite a flow of heat transfer fluid of the second portion.

Abstract translation: 提供了用于控制基板的热均匀性的装置。 可以将基板的热均匀性控制得更均匀，或者基板的热均匀性可以被控制为在所需图案中不均匀。 在一些实施例中，用于控制衬底的热均匀性的装置包括：衬底支撑件，其具有用于在其上支撑衬底的支撑表面; 以及设置在所述基板支撑件内的流动路径，以使传热流体在所述支撑表面下方流动，其中所述流动路径包括第一部分和第二部分，每个部分具有基本相当的轴向长度，其中所述第一部分间隔开约2 从第二部分到约10mm，并且其中第一部分在与第二部分的传热流体的流动相反的方向上提供传热流体的流动。

公开(公告)号：US20180142342A1

公开(公告)日：2018-05-24

申请号：US15814684

申请日：2017-11-16

Applicant: APPLIED MATERIALS, INC.

Inventor： GOICHI YOSHIDOME ,  KEITH A. MILLER ,  HAMID TAVASSOLI ,  ANDREW TOMKO

IPC: C23C14/34 ,  H01J37/34 ,  C23C14/56

Abstract: Embodiments of collimators and process chambers incorporating same are provided herein. In some embodiments, a collimator for use in a substrate processing chamber includes a ring; an adapter surrounding the ring and having an inner annular wall; and a plurality of spokes extending from the inner annular wall and intersecting at a central axis of the collimator.