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公开(公告)号：US20240125491A1
公开(公告)日：2024-04-18
申请号：US18046290
申请日：2022-10-13
Applicant: APPLIED MATERIALS, INC.
Inventor： James Christopher Hansen , Steven Trey Tindel , Paul B. Reuter
IPC: F24F3/163
CPC classification number: F24F3/163
Abstract: Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum above the EFEM chamber, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters that separate the upper plenum from the EFEM chamber, an isolation gate configured to block the return gas flow path responsive to the isolation gate being actuated to a closed position to isolate the one or more filters from an ambient environment responsive to a gas being flowed through the upper plenum when the EFEM chamber is opened to the ambient environment.
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Patent Agency Ranking
公开(公告)号：US11993978B2
公开(公告)日：2024-05-28
申请号：US17856576
申请日：2022-07-01
Applicant: APPLIED MATERIALS, INC.
Inventor： James Christopher Hansen , Douglas Brian Baumgarten , Paul Reuter
CPC classification number: E06B7/2307 , H01L21/67155
Abstract: The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to a threshold sealing force being applied against the sealing portion. The seal further includes a retaining portion substantially perpendicular to the base portion. A surface of the retaining portion is configured to push against the edge surface of the first component responsive to the threshold sealing force being applied against the sealing portion.
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公开(公告)号：US20240376768A1
公开(公告)日：2024-11-14
申请号：US18196088
申请日：2023-05-11
Applicant: APPLIED MATERIALS, INC.
Abstract: The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by a first surface of a first component. The base portion includes a notch in a bottom side of the base portion configured to cause the base portion to laterally flex responsive to an installation force. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to an application of a threshold sealing force against the sealing portion.
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公开(公告)号：US20240003181A1
公开(公告)日：2024-01-04
申请号：US17856576
申请日：2022-07-01
Applicant: APPLIED MATERIALS, INC.
Inventor： James Christopher Hansen , Douglas B. Baumgarten , Paul Reuter
IPC: E06B7/23
CPC classification number: E06B7/2307
Abstract: The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to a threshold sealing force being applied against the sealing portion. The seal further includes a retaining portion substantially perpendicular to the base portion. A surface of the retaining portion is configured to push against the edge surface of the first component responsive to the threshold sealing force being applied against the sealing portion.
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公开(公告)号：US12297691B2
公开(公告)日：2025-05-13
申请号：US18196088
申请日：2023-05-11
Applicant: APPLIED MATERIALS, INC.
Abstract: The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by a first surface of a first component. The base portion includes a notch in a bottom side of the base portion configured to cause the base portion to laterally flex responsive to an installation force. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to an application of a threshold sealing force against the sealing portion.
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公开(公告)号：US12140339B2
公开(公告)日：2024-11-12
申请号：US18046290
申请日：2022-10-13
Applicant: APPLIED MATERIALS, INC.
Inventor： James Christopher Hansen , Steven Trey Tindel , Paul B. Reuter
Abstract: Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum above the EFEM chamber, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters that separate the upper plenum from the EFEM chamber, an isolation gate configured to block the return gas flow path responsive to the isolation gate being actuated to a closed position to isolate the one or more filters from an ambient environment responsive to a gas being flowed through the upper plenum when the EFEM chamber is opened to the ambient environment.
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