公开(公告)号：US10081036B2

公开(公告)日：2018-09-25

申请号：US15269324

申请日：2016-09-19

Applicant: APPLIED MATERIALS, INC.

Inventor： Sankesha Bhoyar ,  Mahesh Arcot ,  Nilesh Chimanrao Bagul ,  Hemantha Raju ,  Ravindra Patil

IPC: B08B3/12 ,  B08B3/14 ,  G01N15/14 ,  G01N15/06 ,  C02F1/00 ,  C02F1/42 ,  C02F103/34

CPC classification number: B08B3/12 ,  B08B3/00 ,  B08B3/14 ,  C02F1/001 ,  C02F1/42 ,  C02F2103/346 ,  C02F2209/40 ,  C02F2301/046 ,  G01N15/0618 ,  G01N15/1436 ,  G01N15/1459 ,  G01N2015/0053 ,  G01N2015/0693 ,  G01N2015/1486

Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.

公开(公告)号：US20180078975A1

公开(公告)日：2018-03-22

申请号：US15269324

申请日：2016-09-19

Applicant: APPLIED MATERIALS, INC.

Inventor： Sankesha Bhoyar ,  Mahesh Arcot ,  Nilesh Chimanrao Bagul ,  Hemantha Raju ,  Ravindra Patil

IPC: B08B3/12 ,  B08B3/14 ,  G01N15/14 ,  G01N15/06 ,  C02F1/00 ,  C02F1/42

CPC classification number: B08B3/12 ,  B08B3/00 ,  B08B3/14 ,  C02F1/001 ,  C02F1/42 ,  C02F2103/346 ,  C02F2209/40 ,  C02F2301/046 ,  G01N15/0618 ,  G01N15/1436 ,  G01N15/1459 ,  G01N2015/0053 ,  G01N2015/0693 ,  G01N2015/1486

Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.

公开(公告)号：US11192153B2

公开(公告)日：2021-12-07

申请号：US16049355

申请日：2018-07-30

Applicant: APPLIED MATERIALS, INC.

Inventor： Sankesha Bhoyar ,  Mahesh Arcot ,  Nilesh Chimanrao Bagul ,  Hemantha Raju ,  Ravindra Patil

IPC: B08B3/12 ,  B08B3/00 ,  C02F1/00 ,  G01N15/14 ,  B08B3/14 ,  C02F1/42 ,  G01N15/06 ,  G01N15/00 ,  C02F103/34

Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.

公开(公告)号：US20180339314A1

公开(公告)日：2018-11-29

申请号：US16049355

申请日：2018-07-30

Applicant: APPLIED MATERIALS, INC.

Inventor： Sankesha Bhoyar ,  Mahesh Arcot ,  Nilesh Chimanrao Bagul ,  Hemantha Raju ,  Ravindra Patil

IPC: B08B3/12 ,  B08B3/14 ,  C02F1/00 ,  C02F1/42 ,  G01N15/06 ,  G01N15/14 ,  B08B3/00 ,  C02F103/34

Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.