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Patent Agency Ranking
公开(公告)号：US11442000B2
公开(公告)日：2022-09-13
申请号：US16716218
申请日：2019-12-16
Applicant: Applied Materials, Inc.
Inventor： Mehdi Vaez-Iravani , Sankesha Bhoyar , Rachit Sharma , Guoheng Zhao
IPC: G01N15/14
Abstract: Examples disclosed herein generally relate to an apparatus and method for detecting particles in a fluid. A system for imaging a particle includes an imaging device. The imaging device has a lens and a detector. A laser source is configured to emit a laser beam. The detector is configured to accumulate an intensity of an accumulated light that passes through the lens. The accumulated light is scattered by the particle. The particle passes through the laser beam over a given period.
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公开(公告)号：US10081036B2
公开(公告)日：2018-09-25
申请号：US15269324
申请日：2016-09-19
Applicant: APPLIED MATERIALS, INC.
Inventor： Sankesha Bhoyar , Mahesh Arcot , Nilesh Chimanrao Bagul , Hemantha Raju , Ravindra Patil
CPC classification number: B08B3/12 , B08B3/00 , B08B3/14 , C02F1/001 , C02F1/42 , C02F2103/346 , C02F2209/40 , C02F2301/046 , G01N15/0618 , G01N15/1436 , G01N15/1459 , G01N2015/0053 , G01N2015/0693 , G01N2015/1486
Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.
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公开(公告)号：US20180078975A1
公开(公告)日：2018-03-22
申请号：US15269324
申请日：2016-09-19
Applicant: APPLIED MATERIALS, INC.
Inventor： Sankesha Bhoyar , Mahesh Arcot , Nilesh Chimanrao Bagul , Hemantha Raju , Ravindra Patil
CPC classification number: B08B3/12 , B08B3/00 , B08B3/14 , C02F1/001 , C02F1/42 , C02F2103/346 , C02F2209/40 , C02F2301/046 , G01N15/0618 , G01N15/1436 , G01N15/1459 , G01N2015/0053 , G01N2015/0693 , G01N2015/1486
Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.
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公开(公告)号：US11192153B2
公开(公告)日：2021-12-07
申请号：US16049355
申请日：2018-07-30
Applicant: APPLIED MATERIALS, INC.
Inventor： Sankesha Bhoyar , Mahesh Arcot , Nilesh Chimanrao Bagul , Hemantha Raju , Ravindra Patil
IPC: B08B3/12 , B08B3/00 , C02F1/00 , G01N15/14 , B08B3/14 , C02F1/42 , G01N15/06 , G01N15/00 , C02F103/34
Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.
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公开(公告)号：US20180339314A1
公开(公告)日：2018-11-29
申请号：US16049355
申请日：2018-07-30
Applicant: APPLIED MATERIALS, INC.
Inventor： Sankesha Bhoyar , Mahesh Arcot , Nilesh Chimanrao Bagul , Hemantha Raju , Ravindra Patil
Abstract: Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.
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