公开(公告)号：US09423042B2

公开(公告)日：2016-08-23

申请号：US13764204

申请日：2013-02-11

Applicant: APPLIED MATERIALS, INC.

Inventor： Chandrasekhar Balasubramanyam ,  Helder Lee ,  Miriam Schwartz ,  Elizabeth Wu ,  Kedarnath Sangam

IPC: F16K15/14 ,  C23C16/44 ,  C23C16/455 ,  F16K51/02 ,  H01L21/677

CPC classification number: F16K15/147 ,  C23C16/4401 ,  C23C16/45519 ,  F16K51/02 ,  H01L21/67772

Abstract: Methods and apparatus for increasing flow uniformity are provided herein. In some embodiments, a slit valve having increased flow uniformity may be provided, the slit valve may include a housing having an opening disposed therethrough, the opening configured to allow a substrate to pass therethrough; a gas inlet formed in the housing; an outer plenum disposed in the housing and coupled to the gas inlet; an inner plenum disposed in the housing and coupled to the outer plenum via a plurality of holes; and a plurality of gas outlets disposed in the housing and fluidly coupling the opening to the inner plenum.