公开(公告)号：US20130298832A1

公开(公告)日：2013-11-14

申请号：US13865672

申请日：2013-04-18

Applicant: APPLIED MATERIALS, INC.

Inventor： JOSEPH M. RANISH ,  PAUL BRILLHART ,  SATHEESH KUPPURAO ,  DONGMING IU

IPC: C30B25/10 ,  F21V7/00

CPC classification number: C30B25/105 ,  F21V7/0083

Abstract: Apparatus for processing a substrate are provided herein. In some embodiments, a lamphead for use in substrate processing includes a monolithic member having a contoured surface; a plurality of reflector cavities disposed in the contoured surface, wherein each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for a lamp; and a plurality of lamp passages, wherein each lamp passage extends into the monolithic member from one of the plurality of reflector cavities.

Abstract translation: 本文提供了用于处理基板的装置。 在一些实施例中，用于衬底处理的灯头包括具有轮廓表面的整体构件; 设置在轮廓表面中的多个反射器空腔，其中每个反射器腔被成形为用作反射器或接收用于灯的可更换反射器; 以及多个灯通道，其中每个灯通道从所述多个反射器腔中的一个延伸到所述整体构件中。