公开(公告)号：US11495932B2

公开(公告)日：2022-11-08

申请号：US16001243

申请日：2018-06-06

申请人： APPLIED MATERIALS, INC.

发明人： Muhannad Mustafa ,  Yu Chang ,  William Kuang ,  Muhammad M. Rasheed ,  Xiping Huo

IPC分类号： H01L21/687 ,  H01R39/12 ,  H01R39/18 ,  H02K13/00 ,  H01L21/67

摘要： Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.

公开(公告)号：US10704142B2

公开(公告)日：2020-07-07

申请号：US15661441

申请日：2017-07-27

申请人： APPLIED MATERIALS, INC.

发明人： Muhannad Mustafa ,  Muhammad M. Rasheed ,  Mario Dan Sanchez ,  Yu Chang ,  William Kuang ,  Vinod Konda Purathe ,  Manjunatha Koppa

IPC分类号： C23C16/455 ,  G01K7/16 ,  C23C16/46 ,  G01K13/08 ,  G01K1/14 ,  C23C16/458

摘要： Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.

公开(公告)号：US20190032210A1

公开(公告)日：2019-01-31

申请号：US15661441

申请日：2017-07-27

申请人： APPLIED MATERIALS, INC.

发明人： Muhannad MUSTAFA ,  Muhammad M. RASHEED ,  Mario Dan SANCHEZ ,  Yu CHANG ,  William Kuang ,  Vinod Konda PURATHE ,  Manjunatha KOPPA

IPC分类号： C23C16/455 ,  G01K7/16 ,  C23C16/458

摘要： Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.

公开(公告)号：US20180358768A1

公开(公告)日：2018-12-13

申请号：US16001243

申请日：2018-06-06

申请人： Applied Materials, Inc.

发明人： Muhannad Mustafa ,  Yu Chang ,  William Kuang ,  Muhammad M. Rasheed ,  Xiping Huo

IPC分类号： H01R39/12 ,  H02K13/00 ,  H01R39/18

CPC分类号： H01R39/12 ,  H01L21/68764 ,  H01R39/18 ,  H02K13/003

摘要： Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.