公开(公告)号：US20160104603A1

公开(公告)日：2016-04-14

申请号：US14864031

申请日：2015-09-24

Applicant: APPLIED MATERIALS, INC.

Inventor： JUNQI WEI ,  KIRANKUMAR SAVANDAIAH ,  ANANTHKRISHNA JUPUDI ,  ZHITAO CAO ,  YUEH SHENG OW

IPC: H01J37/32

CPC classification number: H01J37/3288 ,  H01J37/32477 ,  H01J37/32623 ,  H01J37/32642

Abstract: Apparatus for extending process kit components lifetimes are disclosed. In some embodiments, a process kit includes: a first ring having an inner wall defining an inner diameter, an outer wall defining an outer diameter, an upper surface between the inner wall and the outer wall, and an opposing lower surface between the inner wall and the outer wall, wherein a first portion of the upper surface proximate the inner wall is concave, and wherein a second portion of the upper surface extends horizontally away from the first portion; and a second ring having an upper surface and an opposing lower surface, wherein a first portion of the lower surface is configured to rest upon the second portion of the first ring, wherein a second portion of the lower surface is convex and extends into but does not touch the concave first portion of the upper surface of the first ring.

Abstract translation: 公开了用于延长工艺组件组件寿命的装置。 在一些实施例中，处理套件包括：第一环，其具有限定内径的内壁，限定外径的外壁，内壁和外壁之间的上表面，以及位于内壁和内壁之间的相对的下表面 和所述外壁，其中所述上表面的靠近所述内壁的第一部分是凹形的，并且其中所述上表面的第二部分水平地延伸离开所述第一部分; 以及具有上表面和相对的下表面的第二环，其中所述下表面的第一部分构造成搁置在所述第一环的所述第二部分上，其中所述下表面的第二部分是凸的并延伸到 不接触第一环的上表面的凹形第一部分。