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公开(公告)号：US20210295499A1
公开(公告)日：2021-09-23
申请号：US16821831
申请日：2020-03-17
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Anna Levant , Rafael Bistritzer
Abstract: A method, a non-transitory computer readable medium and a system for determining three dimensional (3D) information of structural elements of a substrate.
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公开(公告)号：US11953316B2
公开(公告)日：2024-04-09
申请号：US17024578
申请日：2020-09-17
Applicant: Applied Materials Israel Ltd.
Inventor： Rafael Bistritzer , Anna Levant , Moshe Eliasof , Michael Chemama , Konstantin Chirko
IPC: H01J37/147 , G01B15/02 , G01N23/2251
CPC classification number: G01B15/02 , G01N23/2251 , H01J37/1478 , G01N2223/401 , G01N2223/6116 , G01N2223/6462 , H01J2237/1506
Abstract: There is provided a system and a method comprising obtaining a first (respectively second) image of an area of the semiconductor specimen acquired by an electron beam examination tool at a first (respectively second) illumination angle, determining a plurality of height values informative of a height profile of the specimen in the area, the determination comprising solving an optimization problem which comprises a plurality of functions, each function being representative of a difference between data informative of a grey level intensity at a first location in the first image and data informative of a grey level intensity at a second location in the second image, wherein, for each function, the second location is determined with respect to the first location, or conversely, when solving the optimization problem, wherein a distance between the first and the second locations depends on the height profile, and the first and second illumination angles.
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公开(公告)号：US11321835B2
公开(公告)日：2022-05-03
申请号：US16821831
申请日：2020-03-17
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Anna Levant , Rafael Bistritzer
Abstract: A method, a non-transitory computer readable medium and a system for determining three dimensional (3D) information of structural elements of a substrate.
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