公开(公告)号：US20210063461A1

公开(公告)日：2021-03-04

申请号：US16560625

申请日：2019-09-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yosef Basson ,  Samuel Ives Nackash ,  Ittamar Levy

IPC: G01R31/02 ,  H01J37/244 ,  H01J37/20 ,  G01R31/28

Abstract: A method, a non-transitory computer readable medium and a detection system for detecting an electric arc hazard related to a wafer. The detection system may include a measurement unit, an electrode and a processing unit. The measurement unit may be configured to provide a measurement result by measuring an electrical parameter of the electrode during a test period, while the wafer may be moved in relation to the electrode, and while a certain electrical field may be formed between the electrode and the wafer; wherein the certain electrical field induces detached ends of partially detached conductive elements of the wafer to move away from the wafer. The processing unit may be configured to determine an existence of the electric arc hazard based on the measurement result.

公开(公告)号：US11293993B2

公开(公告)日：2022-04-05

申请号：US16560625

申请日：2019-09-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yosef Basson ,  Samuel Ives Nackash ,  Ittamar Levy

IPC: G01R31/28 ,  H01J37/244 ,  H01J37/20 ,  G01R31/50 ,  H01J37/26

Abstract: A method, a non-transitory computer readable medium and a detection system for detecting an electric arc hazard related to a wafer. The detection system may include a measurement unit, an electrode and a processing unit. The measurement unit may be configured to provide a measurement result by measuring an electrical parameter of the electrode during a test period, while the wafer may be moved in relation to the electrode, and while a certain electrical field may be formed between the electrode and the wafer; wherein the certain electrical field induces detached ends of partially detached conductive elements of the wafer to move away from the wafer. The processing unit may be configured to determine an existence of the electric arc hazard based on the measurement result.