公开(公告)号：US20150300913A1

公开(公告)日：2015-10-22

申请号：US14560932

申请日：2014-12-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Boris Golberg ,  Amir Moshe Sagiv ,  Haim Feldman ,  Uriel Malul ,  Adam Baer

IPC: G01M11/02

CPC classification number: G01M11/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/95676 ,  G02B21/125

Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.

Abstract translation: 公开了一种工具测量系统和用于测量光学系统的波前（WF）像差的方法。 工具测量系统包括光学装置，其包括还包括高度透明区域的可移动偏转元件。 偏转元件包括被配置为将至少一个物体的第一图像突出到传感器上的第一表面，并且高透明区域包括配置成将至少一个物体的第二图像投影到传感器上的第二表面。 工具测量系统包括被配置为捕获第一和第二图像的传感器和被配置为测量在每个偏转元件位置处的第一和第二图像之间的差分位移的控制器，并且计算取决于被测量的光学设置局部WF梯度 差分位移。

公开(公告)号：US09395266B2

公开(公告)日：2016-07-19

申请号：US14560932

申请日：2014-12-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Boris Golberg ,  Amir Moshe Sagiv ,  Haim Feldman ,  Uriel Malul ,  Adam Baer

IPC: G01M11/00 ,  G01N21/95 ,  G02B21/12

CPC classification number: G01M11/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/95676 ,  G02B21/125

Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.

Abstract translation: 公开了一种工具测量系统和用于测量光学系统的波前（WF）像差的方法。 工具测量系统包括光学装置，其包括还包括高度透明区域的可移动偏转元件。 偏转元件包括被配置为将至少一个物体的第一图像突出到传感器上的第一表面，并且高透明区域包括配置成将至少一个物体的第二图像投影到传感器上的第二表面。 工具测量系统包括被配置为捕获第一和第二图像的传感器和被配置为测量在每个偏转元件位置处的第一和第二图像之间的差分位移的控制器，并且计算取决于被测量的光学设置局部WF梯度 差分位移。