公开(公告)号：US20150300913A1

公开(公告)日：2015-10-22

申请号：US14560932

申请日：2014-12-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Boris Golberg ,  Amir Moshe Sagiv ,  Haim Feldman ,  Uriel Malul ,  Adam Baer

IPC: G01M11/02

CPC classification number: G01M11/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/95676 ,  G02B21/125

Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.

Abstract translation: 公开了一种工具测量系统和用于测量光学系统的波前（WF）像差的方法。 工具测量系统包括光学装置，其包括还包括高度透明区域的可移动偏转元件。 偏转元件包括被配置为将至少一个物体的第一图像突出到传感器上的第一表面，并且高透明区域包括配置成将至少一个物体的第二图像投影到传感器上的第二表面。 工具测量系统包括被配置为捕获第一和第二图像的传感器和被配置为测量在每个偏转元件位置处的第一和第二图像之间的差分位移的控制器，并且计算取决于被测量的光学设置局部WF梯度 差分位移。

公开(公告)号：US20130342893A1

公开(公告)日：2013-12-26

申请号：US13923086

申请日：2013-06-20

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC: G02F1/29

CPC classification number: G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

Abstract translation: 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

公开(公告)号：US09395266B2

公开(公告)日：2016-07-19

申请号：US14560932

申请日：2014-12-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Boris Golberg ,  Amir Moshe Sagiv ,  Haim Feldman ,  Uriel Malul ,  Adam Baer

IPC: G01M11/00 ,  G01N21/95 ,  G02B21/12

CPC classification number: G01M11/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/95676 ,  G02B21/125

Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.

Abstract translation: 公开了一种工具测量系统和用于测量光学系统的波前（WF）像差的方法。 工具测量系统包括光学装置，其包括还包括高度透明区域的可移动偏转元件。 偏转元件包括被配置为将至少一个物体的第一图像突出到传感器上的第一表面，并且高透明区域包括配置成将至少一个物体的第二图像投影到传感器上的第二表面。 工具测量系统包括被配置为捕获第一和第二图像的传感器和被配置为测量在每个偏转元件位置处的第一和第二图像之间的差分位移的控制器，并且计算取决于被测量的光学设置局部WF梯度 差分位移。

公开(公告)号：US08659754B2

公开(公告)日：2014-02-25

申请号：US13923086

申请日：2013-06-20

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC: G01N21/00

CPC classification number: G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

Abstract translation: 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。